Design of high-speed diamond microswitch

Schmid, P.; Adamschik, M.; Kohn, E.

doi:10.1088/0268-1242/18/3/310

Cited by 11 publications

(7 citation statements)

References 10 publications

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“…13b) [139] for imaging micromachining applications. [140] These films then came to be used as structural materials in MEMS [141][142][143][144][145][146] and NEMS [52,53,55] as high-frequency, high-Q mechanical resonators, [146] micromechanical switches, [147,148] and inkjets for corrosive liquids. [144] As conformal coatings, they have been used for the passivation of surfaces and the fabrication of scanning probe microscopy (SPM) cantilevers, [49,91] and efficient field emitters (Fig.…”

Section: Applicationsmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

340

261

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The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20 nm to less than 5 mm are reviewed. These materials contain between 95% and >99.9% diamond crystallites, the balance being made up from other forms of carbon. Within this class of materials there is a continuous range of composition, characteristics, and properties which depend on the nucleation and growth conditions. It is convenient to classify these films as either ultra-nanocrystalline-diamond (UNCD) or nanocrystalline-diamond (NCD) based on their microstructure, properties, and growth environment. In general, UNCD materials are composed of small particles of diamond ca. 2-5 nm in size with sp 2 -carbon bonding between the particles. UNCD is usually grown in argon-rich, hydrogen-poor CVD environments, and may contain up to 95-98% sp 3 -bonded carbon. NCD materials start with high density nucleation, initiating nanometer-sized diamond domains which grow in a columnar manner with the grain size coarsening with thickness. NCD is generally grown in carbon-lean and hydrogen-rich environments. NCD and UNCD exhibit an interesting range of physical properties which find use in X-ray windows and lithography, micro-and nanomechanical and optical resonators, tribological shaft seals and atomic force microscopy (AFM) probes, electron field emitters, platforms for chemical and DNA sensing, and many other applications.

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Section: Applicationsmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

340

261

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“…Smooth UNCD films have also been widely used as structural materials [172][173][174][175][176][177][178] and micromechanical switches [179,180] in MEMS and NEMS technology. Efficient field emitters [181] and field-emitting fibres [182] have also been fabricated with UNCD.…”

Section: Ncd and Uncd Applicationsmentioning

confidence: 99%

Diamond growth by chemical vapour deposition

Grácio¹,

Fan²,

Madaleno³

2010

J. Phys. D: Appl. Phys.

256

156

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This paper reviews the growth of diamond by chemical vapour deposition (CVD). It includes the following seven parts: (1) Properties of diamond: this part briefly introduces the unique properties of diamond and their origin and lists some of the most common diamond applications. (2) Growth of diamond by CVD: this part reviews the history and the methods of growing CVD diamond. (3) Mechanisms of CVD diamond growth: this part discusses the current understanding on the growth of metastable diamond from the vapour phase. (4) Characterization of CVD diamond: we discuss the two most common techniques, Raman and XRD, which have been intensively employed for characterizing CVD diamond. (5) CVD diamond growth characteristics: this part demonstrates the characteristics of diamond nucleation and growth on various types of substrate materials. (6) Nanocrystalline diamond: in this section, we present an introduction to the growth mechanisms of nanocrystalline diamond and discuss their Raman features. This paper provides necessary information for those who are starting to work in the field of CVD diamond, as well as for those who need a relatively complete picture of the growth of CVD diamond.

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“…The RF switches, which usually based on electrostatic actuators. This RF switch can be used as diamond switch [69][70][71][72][73]. The boron doped diamond can be considered as semiconductor with wideband gap for fabricate the electronic device.…”

Section: Diamond Films For Rf-mems Applicationmentioning

confidence: 99%