Design of MEMS vision tracking system based on a micro fiducial marker

Kim, Yong-Sik; Yang, Seung Ho; Yang, Kwang Woong; Dagalakis, Nicholas G.

doi:10.1016/j.sna.2015.08.006

Cited by 12 publications

(6 citation statements)

References 16 publications

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“…The rapid increase in the demand for MEMS has driven governments and research institutions to involve numerous researchers and other resources in developing multifunctional MEMS devices for their respective applications [18,19]. MEMS are considered to be made of multiple independent components, which can be manufactured by using different precision machining methods and different materials, and then these components can be put together to create the required systems via microassembly or micromanipulation and used in different fields [20,21]. The performance of this process increasingly relies on microvisual servoing.…”

Section: Memsmentioning

confidence: 99%

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

et al. 2019

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Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of microscale/nanoscale science, mechanical engineering, electronic engineering, and control engineering. Over the past two decades, it has been widely applied in the fields of MEMS (microelectromechanical systems), bioengineering, and microdevice integration and manufacturing. Microvision servoing is the basic tool for enabling the automatic and precise micromanipulation of microscale/nanoscale entities. However, there are still many problems surrounding microvision servoing in theory and the application of this technology’s micromanipulation processes. This paper summarizes the research, development status, and practical applications of critical components of microvision servoing for micromanipulation, including geometric calibration, autofocus techniques, depth information, and visual servoing control. Suggestions for guiding future innovation and development in this field are also provided in this review.

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Section: Memsmentioning

confidence: 99%

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

et al. 2019

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“…Among these, ARTags and ArUco markers (Garrido-Jurado et al, 2014) are perhaps the most popular, having quickly become the bases of numerous applications. Indeed, such applications are not only numerous, but also quite varied, ranging from macroscopic scale applications with excavators pose estimation as shown by Azar et al (2015) to microscopic scale with MEMS pose retrieval as described by Kim et al (2015). As the design of fiducial markers evolved, so too did methods for their pose estimation, and recent works by Didier et al (2008), Collins and Bartoli (2014) or Zhong and Zhang (2019) detail higher resolution and more robust measures.…”

Section: Introductionmentioning

confidence: 99%

Pose Measurement at Small Scale by Spectral Analysis of Periodic Patterns

et al. 2022

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The retrieval of an observed object's pose is an essential computer vision problem.The challenge arises in many different fields, among them robotics control, contactless metrology, or augmented reality. When the observed object shrinks from the macroscopic scale to the microscopic, pose estimation is further complicated by the weaker perspective of imaging macroscale lenses down to the quasi-orthographic projection inherent to microscope objectives. This paper tackles this issue of microscale pose estimation in two complementary steps that rely on the use of planar periodic targets. We first consider the orthographic projection case as a means of presenting the theory of the method and showing how the pose of periodic patterns can be directly retrieved from the Fourier frequency spectrum of a given image. We then address the perspective case with long focal lengths, in which the full six-degrees of freedom (6-DOF) pose can be retrieved without ambiguities by following the same theoretical background. In addition to theoretically justifying pose retrieval via Fourier analysis of acquired images, this paper demonstrates the method's actual performance. Both simulations and experimentation are conducted to validate the method and confirm an experimental resolution lower than 1/1000 th of a pixel for translations. For orientation measurement, resolutions below 1 µrad. for in-plane orientation, and below 100 µrad. for off-axis orientations can be achieved.

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“…At the micro-scale, it is a particularly relevant solution because computer vision is intrinsically contact-less and multi-directional. Many works have been reported using computer vision as a measurement system to sense displacements at different scales, from micro-systems [ 1 ] to structural engineering [ 2 , 3 ] and also to control microrobots [ 4 , 5 , 6 ], to assembly micro-parts [ 7 ], to determine position versus the six degrees of freedom [ 8 ], to calibrate measurement systems [ 9 ] or to measure micro-forces by measuring the deformation of flexible structures [ 10 , 11 , 12 , 13 , 14 ].…”

Section: Introductionmentioning

confidence: 99%

Digital Holography as Computer Vision Position Sensor with an Extended Range of Working Distances

Asmad

Jacquot

Laurent

et al. 2018

Sensors

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Standard computer vision methods are usually based on powerful contact-less measurement approaches but applications, especially at the micro-scale, are restricted by finite depth-of-field and fixed working distance of imaging devices. Digital holography is a lensless, indirect imaging method recording the optical wave diffracted by the object onto the image sensor. The object is reconstructed numerically by propagating the recorded wavefront backward. The object distance becomes a computation parameter that can be chosen arbitrarily and adjusted to match the object position. No refractive lens is used and usual depth-of-field and working distance limitations are replaced by less restrictive ones tied to the laser-source coherence-length and to the size and resolution of the camera sensor. This paper applies digital holography to artificial visual in-plane position sensing with an extra-large range-to-resolution ratio. The object is made of a pseudoperiodic pattern allowing a subpixel resolution as well as a supra field-of-observation displacement range. We demonstrate an in-plane resolution of 50 nm and 0.0020.166667emdeg. in X, Y and θ respectively, over a working distance range of more than 15 cm. The allowed workspace extends over 12×10×1500.166667emmm3. Digital holography extends the field of application of computer vision by allowing an extra-large range of working distances inaccessible to refractive imaging systems.

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Design of MEMS vision tracking system based on a micro fiducial marker

Cited by 12 publications

References 16 publications

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

Pose Measurement at Small Scale by Spectral Analysis of Periodic Patterns

Digital Holography as Computer Vision Position Sensor with an Extended Range of Working Distances

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