2018
DOI: 10.1007/978-981-13-1513-8_63
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Design of Micro-heater on 3D-SnO2 Gas Sensor

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(2 citation statements)
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“…Heating is a method used to promote the property of gas sensors by assembling an extra heater [143][144][145][146] or the self-heating effect [147][148][149] to maintain the temperature condition that the gas reaction needs. An integrated heater is shown in Figure 13.…”
Section: Heatingmentioning
confidence: 99%
See 1 more Smart Citation
“…Heating is a method used to promote the property of gas sensors by assembling an extra heater [143][144][145][146] or the self-heating effect [147][148][149] to maintain the temperature condition that the gas reaction needs. An integrated heater is shown in Figure 13.…”
Section: Heatingmentioning
confidence: 99%
“…Compared with extra heaters, the actual heating effect is difficult to control. We must consider the thermal loss by the substrate, the surrounding gases, and the contact pads [146]. Moreover, exploring a suitable MOS material to use in self-heating is also important.…”
Section: Heatingmentioning
confidence: 99%