Design of Micro-heaters Inspired by Space Filling Fractal Curves

Karnati, Kumar Sai Charan; Nagireddy, Seshadri Reddy; Mishra, Rishabh; Hussain, Aftab M.

doi:10.1109/tensymp46218.2019.8971334

Cited by 2 publications

(2 citation statements)

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“…The microheater structure is of the suspended-membrane-type supported by four suspension beams, and the active square area houses the resistor. The design of the resistor is based on the Peano-shaped curve derivative, which has the property of a uniform population of surfaces and continuity of self-images . The second-order Peano curve guided by the platinum (Pt) resistor material is used in this design.…”

Section: Resultsmentioning

confidence: 99%

“…The design of the resistor is based on the Peano-shaped curve derivative, which has the property of a uniform population of surfaces and continuity of self-images. 66 The second-order Peano curve guided by the platinum (Pt) resistor material is used in this design. Platinum is selected for its high corrosion resistance and can be deposited by various techniques such as sputtering, evaporation, and electrodeposition.…”

Section: Modified Polarization-insensitive Designmentioning

confidence: 99%

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Microheater-Integrated Spectrally Selective Multiband Mid-Infrared Nanoemitter for On-Chip Optical Multigas Sensing

Rahimian Omam,

Ghobadi,

Khalichi

et al. 2023

ACS Appl. Nano Mater.

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Traditional optical gas sensors often require multiple components such as broadband infrared sources, detectors, and band-pass filters to detect various target gases, resulting in bulky and expensive sensor designs. A streamlined optical gas-sensing platform utilizing a narrowband thermal emitter with a spectrally selective response, capable of accommodating various target gases, has the potential to supplant current bulky designs. Through the on-chip integration of a narrowband metamaterial perfect absorber with a microelectromechanical system (MEMS) heater, a selective infrared source emitter could be designed. In this paper, a multiband metamaterial absorber with resonance modes located at different gas absorption signatures is developed for optical multi-gas-sensing applications. The proposed nanoemitter supports penta-band light absorption through the simultaneous excitation of phononic modes (within the hexagonal boron nitride (hBN) topmost layer) and plasmonic modes (with the spectrally selective underlying metal−insulator−metal (MIM) absorber stack). It achieves five near-perfect sharp absorption resonance peaks compatible with the H 2 S, CH 4 , CO 2 , NO, and SO 2 gas absorption signatures in the mid-infrared (MIR) spectral range. This spectrally engineered multiwavelength absorption behavior is achieved by simultaneously coupling the optical phonons (OPhs) and the plasmonic modes in the vicinity of the OPh region of hBN and by exciting plasmonic modes with the help of the spacer (ZnTe: zinc telluride) and the metallic nanogratings. Finally, this low-cost and efficient penta-band absorber is combined with a MEMSbased microheater. The microheater uses a Peano-shaped configuration to provide a highly uniform surface temperature, which is crucial for accurate and reliable gas sensing. The proposed platform demonstrates excellent potential in terms of cost-effectiveness, source-free operation, and suitability for multi-gas-sensing platforms.

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Section: Resultsmentioning

confidence: 99%

Section: Modified Polarization-insensitive Designmentioning

confidence: 99%