Design of microstrip patch antenna element and array on quartz glass wafer with suspended cavity based on MEMS technology

Xu, Junjie; Peng, Zhen; Long, Zhiming; Wang, Zhuqing

doi:10.1007/s00542-023-05467-0

Cited by 4 publications

(1 citation statement)

References 39 publications

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“…By controlling the state of the RF MEMS switches, the antenna can achieve three different radiation direction maps at 8 GHz frequency, and the antenna size is on the millimeter scale, which is conducive to the miniaturization and integration of the system. In addition, in recent years, there has been some progress in the research on back-cavity patch antennas [70,71], photonic bandgap patch antennas [72][73][74], laminated patch antennas [75], and suspended MEMS patch antennas [76].…”

Section: Rf Me Ms Device Classification and Structurementioning

confidence: 99%

A review of research on RF MEMS for metaverse interactions

Nan,

Jia,

et al. 2024

J. Micromech. Microeng.

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Metaverse as a comprehensive integration of multiple digital technologies of the new generation, enables human beings to bring unprecedented immersive experiences with the support of virtual reality, augmented reality, blockchain, digital twin, Artificial Intelligence, haptic IoT, and human-computer interaction. In view of the urgent need for high-speed and high-capacity data transmission as well as high integration, RF MEMS devices have become the core components for metaverse system building due to their advantages of miniaturization, high integration, and low power consumption. Playing a pivotal role in real-time high-capacity data transmission and signal processing in metaverse interactive systems, the low cost and high performance of RF MEMS devices have once again become the focus of attention for people from all walks of life. Therefore, this paper focuses on the working principles and performance optimization of RF MEMS devices. Firstly, the classification and basic principles of RF MEMS devices are introduced, followed by the advanced fabrication technology and optimization scheme of MEMS devices, and then the advanced applications of RF MEMS devices in the field of metaverse are discussed in focus, including IoT mobile communication, Artificial Intelligence, and flexible wearables. Finally, the prospects and potential challenges for the development of RF MEMS devices interacting with the metaverse are summarized and discussed.

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