Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images

Scholles, M.; Bräuer, Andreas; Frommhagen, K.; Gerwig, Ch.; Höfer, Bernd; Lakner, Hubert; Schenk, Harald; Schwarzenberg, Markus

doi:10.1117/12.680317

Cited by 6 publications

(2 citation statements)

References 14 publications

(15 reference statements)

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“…Optical MEMS or MOEMS (micro opto electro mechanical systems), for example scanner mirrors [5] almost always operate in combination with further components like light sources (LEDs, lasers), optics, electronics or optionally detectors. Some prominent example are laser projection [6], retina scanning [7], LiDAR or other measurement systems. More sophisticated MOEMS have been realized by the integration of a diffraction grating on the tiltable plate of a scanner device replacing the simple mirror [8].…”

Section: Previous Workmentioning

confidence: 99%

Concept for a new approach to realize complex optical systems in high volume

et al. 2017

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A groundbreaking new approach [1] for the fabrication of complex photonic systems, especially such with off-axis optics, has been invented based on planar mounting in combination with a novel folding approach. Up to now volume production of photonic systems has been optimized for on-axis lens based optical systems. Chromatic aberration limits the usage or spectral range of these systems. Applying mirrors instead of lenses may help to suppress chromatic aberrations and wavelength depending absorption. The assembly of reflective optics, often in an off-axis configuration, is a complex process. So far most tools for volume production apply stacking of components in planar technology. Off-axis systems are typically assembled by more or less manually alignment of the components, which is not in favor for mass and low cost production of these systems. The novel approach utilizers a planar substrate featuring preprocessed bending lines. A high accuracy tool for planar assembly places the components onto the substrate. Then the sides of the substrate are bent leading to a predefined three dimensional body. The off-axis optical path inside is generated automatically. This concept is not limited to rectangular shapes but can also be applied to more complex systems, for example the so called "W-configuration" for a Czerny-Turner spectrometer. First tests of the "bend and place assembly" have been performed successfully on a camera setup to prove the working principle.

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Section: Previous Workmentioning

confidence: 99%

Concept for a new approach to realize complex optical systems in high volume

et al. 2017

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“…For the first full color image projection [13] this projection module has been used in combination with the laser bank shown in the left part of Figure 8. Here commercially available lasers for red (660nm) and blue (440nm) were used together with a prototype for a green laser at 540nm.…”

Section: System Realizationmentioning

confidence: 99%

Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

Scholles

Bräuer

Frommhagen

et al. 2007

MOEMS and Miniaturized Systems VI

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Recently, there has been substantial progress in the development of ultra-compact image projection systems with dimensions clearly below the size of products based on DMDTM technology. This has been enabled by the availability of electrically modulated laser sources for all three elementary colors and a two-dimensional resonant micro scanning mirror as MOEMS device for light deflection. The laser beam formed by collimator optics is directed onto the micro scanning mirror. Then, the reflected beam describes a highly complicated Lissajous figure on the projection screen with flare angles of up to 20 degrees. By driving the mirror and electrically modulating the intensity of the laser beam in a synchronous manner, projection of images can be achieved. In this contribution we will present the theoretical background of the projection system as well as the latest achievements in system design. Both monochrome and full color systems are currently available. The latter use a separate laser bank as RGB light source, which is coupled with the projection head comprising the micro-optics and the micro scanning mirror. For monochrome red systems, the laser diode can be integrated into the projection head as well, whose volume could be reduced to 15mm x 7 mm x 5mm. All systems have VGA (640 x 480 pixels) resolution and operate with 8 bit color depth per pixel and 50 frames per second. This degree of miniaturization makes laser projection systems attractive for integration into mobile devices and overcomes limitations of display size in such appliances

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MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

403

175

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Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

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Design of miniaturized optoelectronic systems using resonant microscanning mirrors for projection of full-color images

Cited by 6 publications

References 14 publications

Concept for a new approach to realize complex optical systems in high volume

Concept for a new approach to realize complex optical systems in high volume

Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

MEMS Laser Scanners: A Review

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