“…In general, the effective vacuum pumping speeds Sp of a cryo-sorption pump can be estimated from the equations 1 to 3 [2,6,7], where Co, Ī±, C, A, vav, T, and M are, respectively, orifice conductance, pumping probability, orifice conductance per unit area, pumping surface area, average gas velocity, temperature, and molecular mass number in MKS unit.…”