Abstract:Aiming at the performance requirements of positioning accuracy and stability of piezoelectric inertial actuators in fields including micro‐operation and biomedical engineering, a piezoelectric inertial actuator with wedge‐shaped friction foot structure using bimorph films is proposed in this paper. The wedge‐shaped friction foot structure can adjust the friction force in different driving stages, which suppresses the backward motion and effectively improves the output performance of the actuator. And the bimor… Show more
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