Design of servo control systems with quadratic optimal control and observed-state feedback control for mems-based storage device

This study presents a conventional Ziegler-Nichols (ZN) Proportional Integral Derivative (PID) controller, having reviewed the mathematical modeling of the Micro Electro Mechanical Systems (MEMS) Tunable Capacitors (TCs), and also proposes a fuzzy PID controller which demonstrates a better tracking performance in the presence of measurement noise, in comparison with conventional ZN-based PID controllers. Referring to importance and impact of this research, the proposed controller takes advantage of fuzzy control properties such as robustness against noise. TCs are responsible for regulating the reference voltage when integrated into Alternating Current (AC) Voltage Reference Sources (VRS). Capacitance regulation for tunable capacitors in VRS is carried out by modulating the distance of a movable plate. A successful modulation depends on maintaining the stability around the pull-in point. This distance regulation can be achieved by the proposed controller which guarantees the tracking performance of the movable plate in moving towards the pull-in point, and remaining in this critical position. The simulation results of the tracking performance and capacitance tuning are very promising, subjected to measurement noise. Article Highlights This article deals with MEMS tunable capacitor dynamics and modeling, considering measurement noise. It designs and applies fuzzy PID control system for regulating MEMS voltage reference output. This paper contributes to robustness increase in pull-in performance of the tunable capacitor.

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“…The modified plant is where Putting Eqs. (19), (20), and ( 16) together yields…”

Section: Control Design and Simulationmentioning

confidence: 99%

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

et al. 2021

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“…Few works have been done on the closed-loop control of microstructures, which is quite negligible compared to the number of studies on open-loop controller. Jeon and Grunwald investigated closed loop control of MEMs-based storage device [20]. Merced et al [21] studied closed loop control of an electrothermally actuated MEMS structure.…”

Section: Introductionmentioning

confidence: 99%

Multi input versus single input sliding mode for closed-loop control of capacitive micro structures

et al. 2019

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Considering the importance of closed-loop control for control of capacitive microstructures and the high capability of the sliding-mode controllers in control of nonlinear systems, the present study has investigated the closed-loop control of these structures using the sliding-mode controller. For this purpose, the sliding-mode controller was designed for single-and double-input cases, and the applied voltages between the capacitive electrodes was considered as the control inputs. The simulation results for both single-and double-input cases have been extracted and presented, and it was concluded that achieving an accurate control for the single input case is not always feasible given that the sign of the sliding surface changes and the control parameter assume positive definite values. Moreover, it has been shown that an accurate control could be achieved by employing the double-input controller without any limitations. The chattering phenomenon was also thoroughly studied in the initial controller design. To eliminate this phenomenon, a smooth variation has been applied to the switching of the sliding surface. In addition to tracking, the capacitive microstructure has been investigated to reduce the relative distance between the two electrodes (in order to increase the capacitive storage), and the obtained results have been presented.

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Design of servo control systems with quadratic optimal control and observed-state feedback control for mems-based storage device

Cited by 2 publications

References 8 publications

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

Multi input versus single input sliding mode for closed-loop control of capacitive micro structures

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