2019
DOI: 10.1109/jstqe.2018.2885496
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Design of Slow-Light Subwavelength Grating Waveguides for Enhanced On-Chip Methane Sensing by Absorption Spectroscopy

Abstract: The performance of on-chip gas sensors using absorption spectroscopy are currently limited by the small overlap and reduced interaction length between the light and the analyte. Here, the use of slow-light in subwavelength grating (SWG) waveguide integrated on a silicon photonic chip is proposed to improve methane sensing by tunable diode laser absorption spectroscopy in the near-infrared. Such SWG waveguide increases the interaction by two means. Firstly, close to the photonic bandgap edge, a SWG waveguide no… Show more

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Cited by 35 publications
(16 citation statements)
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“…Among various configurations, sensors based on dome-like gas cells [44,47,50,59], allow for planar integration of emitters and detectors, and could be used to further reduce their size. The main challenge is the relatively small pathlengths, l , which can be addressed by further device optimization, e.g., based on multi-pass designs [57,74,111], or use of photonic crystals [55,112] or optical cavities [56] for enhanced absorption. More recently, photoacoustic gas sensors, based on low-cost commercially available MEMS microphones have emerged as simple, compact, and highly reliable devices [15,50].…”
Section: Discussionmentioning
confidence: 99%
“…Among various configurations, sensors based on dome-like gas cells [44,47,50,59], allow for planar integration of emitters and detectors, and could be used to further reduce their size. The main challenge is the relatively small pathlengths, l , which can be addressed by further device optimization, e.g., based on multi-pass designs [57,74,111], or use of photonic crystals [55,112] or optical cavities [56] for enhanced absorption. More recently, photoacoustic gas sensors, based on low-cost commercially available MEMS microphones have emerged as simple, compact, and highly reliable devices [15,50].…”
Section: Discussionmentioning
confidence: 99%
“…where S wg = dn e f f dn med (5) is the waveguide sensitivity. Note that a sensor with high sensitivity is not enough for good detection, as the FWHM of the sensor should also be minimized.…”
Section: Lt-mzi Structure and Analysismentioning
confidence: 99%
“…Next, we optimized the slot waveguide with a 100 nm slot gap width G slot such that we maximized the waveguide sensitivity S wg . S wg was determined at λ = 1.55 µm using the FDE solver and Equation (5). A change in the air cladding medium index ∆n med of 0.001 was introduced and the corresponding change in the mode effective index ∆n eff was calculated using the FDE solver from which the S wg value was determined with Equation (5).…”
Section: Components Designmentioning
confidence: 99%
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“…Structural slow light can be used in many important applications like on-chip compact delay lines, all-optical switching and signal buffering for optical storage [11]. Furthermore, slow light strongly enhances light-matter interaction in transparent materials and is thus of great interest for non-linear optics [12], lasers [13] and sensing [14], [15].…”
Section: Introductionmentioning
confidence: 99%