Design of the OMVPE Process

Stringfellow, G. B.

doi:10.1016/b978-012673842-1/50010-7

Organometallic Vapor-Phase Epitaxy 1999

DOI: 10.1016/b978-012673842-1/50010-7

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Design of the OMVPE Process

G. B. Stringfellow¹

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2008

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Carbon clusters in N-doped ZnO by metal-organic chemical vapor deposition

Tang

Zhu

et al. 2008

Applied Physics Letters

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We employed transmission electron microscopy and Raman spectra to investigate the behavior of impurity carbon usually unintentionally introduced in N-doped ZnO by metal-organic chemical vapor deposition. Unintentional doped carbon may form graphite clusters along grain boundaries resulting in n-type domains and possibly be a big obstacle for the realization of p-type conductivity. The enhanced desorption rate of hydrocarbon radicals by high temperature and oxygen atom will significantly suppress carbon incorporation rate. The results provide understandings of the formation mechanism of carbon clusters and help us find some available routines to minimize carbon impurity for realization of p-type N-doped ZnO.

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Carbon clusters in N-doped ZnO by metal-organic chemical vapor deposition

Tang

Zhu

et al. 2008

Applied Physics Letters

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show abstract

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Design of the OMVPE Process

Cited by 1 publication

References 170 publications

Carbon clusters in N-doped ZnO by metal-organic chemical vapor deposition

Carbon clusters in N-doped ZnO by metal-organic chemical vapor deposition

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