Design of Three-Stratum Tool in Indium-Tin-Oxide Removal

Abstract

A design of three-stratum tool is presented as a machining tool for removing the Indium-tin-oxide (ITO) thin-films from displays' color filter surface of TFT-LCD in electrochemical etching process. The low yield of ITO persists throughout the entire semiconductor production process. For the precision re-moval processes, a narrow width of the three-stratum tool and a short height between the three-stratum tool and the displays' color filter surface provides an effective removal performance. A pulsed current can improve the effect of dreg discharge and contributes to the achievement of a fast workpiece (displays' color filter) feed rate, but raises the current rating. A displays' color filter with a fast feed rate is combined with enough elec-tric power to provide highly effective removal. An effective de-sign of the three-stratum tool and a low-cost recycle processes using the just needs quite short time to make the ITO thin-films remove easily and cleanly.