2D) planar PhCs, which have 2D periodicity in the membrane plane [1]. Such structures feature in-plane optical confinement, which is based on the 2D photonic bandgap (PBG) effect and on vertical confinement resulting from the high contrast between the refractive index (RI) of the dielectric membrane and that of the surrounding (bottom and top) claddings. Although air-bridge structures are effective for making advanced integrated optical components, such as single-photon emitters [2, 3], low-threshold nanolasers [4-6], ultrasmall filters [7], ultralow-power and ultrafast switches [8], and highly efficient single-quantum-dot emitters [9-12], their poor mechanical stability, high thermal resistance, complex fabrication requirements, and vulnerability to contamination are major obstacles to heat management and heterogeneous integration. Furthermore, when 2D PhCs are fully cladded by air, continuous oxidation and unavoidable contamination can affect the structural characteristics of the photonic device [13]. To address these problems, various investigations have focused on planar PhC nanocavities partially or fully clad by low-RI materials [14][15][16][17][18][19][20][21][22][23].In particular, cavities made of planar PhCs with three missing holes linearly arranged (L3) are attracting considerable interest for applications involving high-qualityfactor (high-Q) nanocavities because these structures can selectively confine light of various wavelengths. PhC L3 nanocavities with high-Q factors and a small cubic-wavelength volume are used for all-optical switching [8], lowthreshold lasing [4-6], cavity quantum electrodynamics [7,10], and to control ultrafast laser pulses [24]. Their higherorder modes are important to efficiently pump nanocavity lasers [4] and to selectively excite quantum dots embedded within the cavity [25]. Recently, work on L3 PhC cavities surrounded by low-RI material cladding has mainly concentrated on maximizing the Q factor of the fundamental Abstract This paper presents a theoretical investigation of the optical properties of a three missing holes pointdefect cavity implemented in a planar photonic crystal with various low refractive index cladding materials. To describe the cavity operation, we analyze how the refractive index (RI) of the cladding material depends on the Q factor and resonant wavelength for both asymmetric and symmetric structures. The results show that the radiation losses of the structures increase for decreasing RI contrast and that the Q factor drops dramatically. We show that the periodicity of the RI of the cladding material is a critical consideration for realizing symmetric structures with high-Q factors. Furthermore, we fine-tune the radius and position of the lateral-, upper-, and lower-boundary holes near the cavity edges, which allows us to increase the Q factor of the planar photonic crystal cavity by a factor as large as 25 (Q > 10 4 ). These findings provide useful design rules for applications involving mechanically stable photonic crystal cavities with high-Q fact...