Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

Shimizu, Yuki; Mano, K.; Murakami, Hiroki; Hirota, Shunsuke; Matsukuma, Hiraku; Gao, Wei

doi:10.1016/j.precisioneng.2019.07.022

Cited by 11 publications

(4 citation statements)

References 25 publications

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“…In addition, severe optical alignments are required for the pair of mirrors and the angle of incidence of the laser beam with respect to the interferometer unit [132], while perfect polarization modulation control is difficult [134]. On the contrary, the optical configuration of the non-orthogonal two-axis Lloyd’s mirror interferometer, in which a pair of mirrors are placed to have angles of (90 + α) degrees with respect to the substrate surface as shown in Figure 21b, allows the interferometer unit to be designed in a compact size and to be robust against optical misalignments of the optical components and the laser beam projected onto the interferometer [82,83,84,85].…”

Section: Fabrication and Verification Of Scale Gratingmentioning

confidence: 99%

“…After that, the beam is magnified by the beam expander designed in the Galilean configuration. Furthermore, homogenization of the light intensity in the collimated laser beam with the employment of a beam shaper [135] could reduce the amplitude deviation of the fabricated pattern structures on planar scale gratings [85].…”

Section: Fabrication and Verification Of Scale Gratingmentioning

confidence: 99%

“…In addition, the six-degree-of-freedom planar encoder [54,55], which can be realized by combining the principle of three-axis autocollimator and that of the three-axis planar encoder, is introduced. Furthermore, in the following section, the fabrication method of large-area planar scale gratings based on the fast-tool-servo technique [80,81], the non-orthogonal two-axis Lloyd’s mirror interferometer [82,83,84,85], as well as the evaluation technique of the large-area planar scale gratings based on the Fizeau interferometer [86,87,88] are presented.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Shimizu

Matsukuma

Gao

2019

Sensors

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In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical sensors, such as the three-axis autocollimator, the three-axis planar encoder, and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. With the employment of grating reflectors, measurement of multi-axis translational and angular displacement can be carried out while employing a single laser beam. Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the description of the evaluation method of the large-area planar scale grating based on the Fizeau interferometer.

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Section: Fabrication and Verification Of Scale Gratingmentioning

confidence: 99%

Section: Fabrication and Verification Of Scale Gratingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Shimizu

Matsukuma

Gao

2019

Sensors

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“…In order to process three-dimensional (3D) structures with various materials and complex topography in the scale of micron or even submicron, many traditional processing techniques, such as focused ion beam processing and electronic beam processing are available [3,4]. However, they suffer from low efficiency and limited capability in processing large-area 3D micro-structured surfaces [5,6]. With the commercialization of ultrafast lasers, femtosecond laser processing has been demonstrated as a potential and powerful technology for producing microstructures [7,8].…”

Section: Introductionmentioning

confidence: 99%

Single-pulse femtosecond laser ablation of monocrystalline silicon: A modeling and experimental study

Chen

Zhang

Yang

et al. 2022

Applied Surface Science

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Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

Shimizu

2021

Nanomanuf Metrol

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Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating, which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors. Especially, optical configurations such as Lloyd’s mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner. For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder, an orthogonal two-axis Lloyd’s mirror interferometer, which has been realized through innovation to Lloyd’s mirror interferometer, has been developed. In addition, the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer. Furthermore, the optical setup for the non-orthogonal two-axis Lloyd’s mirror interferometer has been optimized for the fabrication of a large-area scale grating. In this review article, principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed, while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders. Verification of the pitch of the fabricated pattern structures, whose accuracy strongly affects the performance of planar/surface encoders, is also an important task to be addressed. In this paper, major methods for the evaluation of a grating pitch are also reviewed.

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Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

Cited by 11 publications

References 25 publications

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Single-pulse femtosecond laser ablation of monocrystalline silicon: A modeling and experimental study

Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

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