2008
DOI: 10.1088/0963-0252/17/3/035009
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Design parameter investigation of a cold-cathode Penning ion source for general laboratory applications

Abstract: An investigation of different design parameters of a cold-cathode Penning ion source is described. The Penning source had an iron cathode body, samarium cobalt permanent magnet, stainless steel anode and iron cathode faceplate. The faceplate extraction orifice diameter, anode shape and permanent magnet location were adjusted. Discharge current-voltage characteristics and current to a grounded target were measured for the different ion source configurations. Results indicate that for hydrogen and helium operati… Show more

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Cited by 29 publications
(9 citation statements)
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“…[61,62] The two most important parameters for argon ion milling are plasma generation and ion extraction. The ion source used in this study is a Penning ion source [63]. The instrumental setup of the Penning ion source is schematically presented in Figure 35(a).…”
Section: Oblique Angle Metal Depositionmentioning
confidence: 99%
“…[61,62] The two most important parameters for argon ion milling are plasma generation and ion extraction. The ion source used in this study is a Penning ion source [63]. The instrumental setup of the Penning ion source is schematically presented in Figure 35(a).…”
Section: Oblique Angle Metal Depositionmentioning
confidence: 99%
“…[2][3][4] PIGs are, also, very practical and can be used in sputtering, evaporation of surfaces, fusion application, and neutron generators. [5][6][7] The behavior of Penning gas discharge has been investigated both experimentally and numerically. 8 In the experimental part, PIG and Penning discharge characteristics have been studied for various parameters such as the anode length, magnetic field, working-gas pressure, and so on.…”
Section: Introductionmentioning
confidence: 99%
“…The extraction of ions, from the extraction electrode was studied using different geometry of the extraction electrode and the extraction angle [3]. Penning ion sources are used in various fields like sputtering, evaporation of sources, and electromagnetic separation of isotopes, fusion applications [4] etc.…”
Section: Introductionmentioning
confidence: 99%