Design, simulation and analysis of RF MEMS capacitive shunt switches with high isolation and low pull-in-voltage

Sravani, K. Girija; Prathyusha, D.; Gopichand, Ch.; Maturi, S.; El-Sinawi, Ameen; Rao, K. Srinivasa

doi:10.1007/s00542-020-05021-2

Cited by 5 publications

(3 citation statements)

References 22 publications

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“…T A B L E 3 Operating characteristics of the proposed switch respect to some newly published works Sravani et al 19 Molaei and Ganji 37 Goel et al 4 Sravani et al 20 Shanthi et al 29 Bansal et al 38 Deng et al 39 This…”

Section: Discussionmentioning

confidence: 94%

“…A good selection of actuation methods with an accurate design will improve the overall performance of the switch. Electrothermal, 3 piezoelectric, 18 and electrostatic 19,20 actuation methods are extensively used as drive mechanisms of RF MEMS switches. Electrothermal actuators produce high contact force, can be optimized for large traveling ranges, and have CMOS compatible operating voltages and fabrication processes.…”

Section: Introductionmentioning

confidence: 99%

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A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications

Dadgar

Aghdam

2022

Circuit Theory & Apps

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A new structure for low‐loss and high‐isolation radio‐frequency microelectromechanical systems (RF MEMS) switches is presented. The high contact force of the switch leads to very small ranges for contact resistance which is the main constrain of DC‐contact RF MEMS switches. The contact resistance of the switch is 27 mΩ leading to negligible thermal noise which is one of the most important parameters for devices operating at RF front‐ends immediately after the antenna where there is not any active stage. The switch is composed of two actuators: an electrothermal actuator for actuation of the switch from OFF to ON state and an electrostatic actuator to hold the switch at ON state. The insertion loss, return loss, and isolation of the switch for frequencies below 70 GHz are −0.35, −20, and −10 dB, respectively. The contact force and contact resistance of the switch are 0.93 mN and 0.027 Ω, respectively. Electrothermal and electrostatic actuators require 0.91 and 50 actuation voltages, respectively. During the ON‐state, the power consumption of the switch is near zero. The low contact resistance and high‐isolation characteristics of the switch make it very suitable for mobile front‐ends.

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Section: Discussionmentioning

confidence: 94%

Section: Introductionmentioning

confidence: 99%

A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications

Dadgar

Aghdam

2022

Circuit Theory & Apps

View full text Add to dashboard Cite

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“…In the MEMS accelerometers, the operational frequency range is from 0.1 Hz to 10 4 Hz, for applications from inertial navigation to explosion monitoring [16]. To evaluate the stiffness of suspending springs, theories of elastic straight beam, the Sigitta spring, and serpentine spring have been applied [1,14,25,26]. In particular, recently an actuator for out-of-plane displacement has been proposed and investigated by the finite element method (FEM).…”

Section: Introductionmentioning

confidence: 99%

Archive of Mechanical Engineering

2022

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In this paper, a spring system symmetrically arranged around a circular plate compliant to out-of-plane oscillation is proposed. The spring system consists of single serpentine springs mutually coupled in a plane. Three theoretical mechanical models for evaluating the stiffness of the spring system are built, which are based on the flexural beam, Sigitta, and serpentine spring theories and equivalent mechanical spring structure models. The theoretically calculated results are in good agreement with numerical solutions using the finite element method, with errors less than 10% in the appropriate dimension ranges of the spring. Compared to similar spring structures without mechanical coupling, the proposed mechanically coupled spring shows advantage in suppressing the mode coupling.

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