Design, simulation, and fabrication of a MEMs switched superconducting microstrip hairpin filter

Martínez, José A.; Hijazi, Y.; Brzhezinskaya, M. M.; Bogozi, A.; Noel, Julien; Vlasov, Yuriy; Larkins, G.L.

doi:10.1016/j.physc.2007.06.006

Cited by 6 publications

(4 citation statements)

References 9 publications

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“…sensors, 7 and high-frequency filters and switches. 8,9 These superconductors normally need nanoengineering to achieve the required performance in those applications. 10 Besides, nanostructured superconductors are central elements in refined quantum computing architectures such as one-dimensional (1D) nanowire-based quantum oscillators 11 and highly integrated Josephson junction networks.…”

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confidence: 99%

“…Superconductors are integrated in major equipment and machinery, for instance as part of powerful magnets, employed for nuclear magnetic resonance, fusion reactors, and particle accelerators . Moreover, they have become excellent materials for energy storage, electrical generators, magnetic sensors, and high-frequency filters and switches. , These superconductors normally need nanoengineering to achieve the required performance in those applications . Besides, nanostructured superconductors are central elements in refined quantum computing architectures such as one-dimensional (1D) nanowire-based quantum oscillators and highly integrated Josephson junction networks .…”

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confidence: 99%

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Three-Dimensional Superconducting Nanohelices Grown by He⁺-Focused-Ion-Beam Direct Writing

et al. 2019

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Novel schemes based on the design of complex three-dimensional (3D) nanoscale architectures are required for the development of the next generation of advanced electronic components. He+ focused-ion-beam (FIB) microscopy in combination with a precursor gas allows one to fabricate 3D nanostructures with an extreme resolution and a considerably higher aspect ratio than FIB-based methods, such as Ga+ FIB-induced deposition, or other additive manufacturing technologies. In this work, we report the fabrication of 3D tungsten carbide nanohelices with on-demand geometries via controlling key deposition parameters. Our results show the smallest and highest-densely packed nanohelix ever fabricated so far, with dimensions of 100 nm in diameter and aspect ratio up to 65. These nanohelices become superconducting at 7 K and show a large critical magnetic field and critical current density. In addition, given its helical 3D geometry, fingerprints of vortex and phase-slip patterns are experimentally identified and supported by numerical simulations based on the time-dependent Ginzburg–Landau equation. These results can be understood by the helical geometry that induces specific superconducting properties and paves the way for future electronic components, such as sensors, energy storage elements, and nanoantennas, based on 3D compact nanosuperconductors.

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confidence: 99%

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confidence: 99%

Three-Dimensional Superconducting Nanohelices Grown by He⁺-Focused-Ion-Beam Direct Writing

et al. 2019

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“…Superconducting materials are characterized by the transport of electricity without energy losses, rendering them as highly applicable materials for electrical generators, energy storage, high-frequency filters and switches, , magnetic sensors, and powerful magnets (high magnetic fields) . Nowadays, these superconducting magnets are employed for nuclear magnetic resonance, in magnetic resonance imaging, in fusion reactors, and as part of particle accelerators …”

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confidence: 99%

Vertical Growth of Superconducting Crystalline Hollow Nanowires by He⁺ Focused Ion Beam Induced Deposition

et al. 2018

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Novel physical properties appear when the size of a superconductor is reduced to the nanoscale, in the range of its superconducting coherence length (ξ). Such nanosuperconductors are being investigated for potential applications in nanoelectronics and quantum computing. The design of three-dimensional nanosuperconductors allows one to conceive novel schemes for such applications. Here, we report for the first time the use of a He focused-ion-beam-microscope in combination with the W(CO) precursor to grow three-dimensional superconducting hollow nanowires as small as 32 nm in diameter and with an aspect ratio (length/diameter) of as much as 200. Such extreme resolution is achieved by using a small He beam spot of 1 nm for the growth of the nanowires. As shown by transmission electron microscopy, they display grains of large size fitting with face-centered cubic WC phase. The nanowires, which are grown vertically to the substrate, are felled on the substrate by means of a nanomanipulator for their electrical characterization. They become superconducting at 6.4 K and show large critical magnetic field and critical current density resulting from their quasi-one-dimensional superconducting character. These results pave the way for future nanoelectronic devices based on three-dimensional nanosuperconductors.

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“…The switch fabrication process is described in detail in [58][59][60][61]. After the full fabrication cycle, the device was mounted onto an aluminium test fixture where connectors make contact with the device ports using indium and is connected to the testing system.…”

Section: Resultsmentioning

confidence: 99%

Review of the properties of gold material for MEMS membrane applications

Noel¹

2016

IET Circuits, Devices & Systems

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Materials selection for radio frequency (RF) microelectromechanical (MEM) switches application is important for overall design and fabrication of devices. The processing techniques and microstructures of the materials in these devices differ from the techniques used in bulk structures. Although the properties and morphology of a bulk material may be well characterised, thin film materials have properties substantially different. MEM switches for RF and cryogenic applications has been developed where the switch is integrated in a coplanar waveguide on a LaAlO 3 substrate as structure with a gold membrane bridge suspended above an area of the centre superconductor (YBa 2 Cu 3 O 7) covered with a BaTiO 3 dielectric. The gold (Au) membrane is actuated by the electrostatic attractive force acting between transmission line and the membrane when a dc control voltage is applied. The value of the actuation force greatly depends on the geometry and mechanical properties of the bridge material. A summary and review of the state-of-the-art in MEM switches using Au membrane elements is presented and its application for cryogenic temperature is discussed.

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Design, simulation, and fabrication of a MEMs switched superconducting microstrip hairpin filter

Cited by 6 publications

References 9 publications

Three-Dimensional Superconducting Nanohelices Grown by He⁺-Focused-Ion-Beam Direct Writing

Three-Dimensional Superconducting Nanohelices Grown by He⁺-Focused-Ion-Beam Direct Writing

Vertical Growth of Superconducting Crystalline Hollow Nanowires by He⁺ Focused Ion Beam Induced Deposition

Review of the properties of gold material for MEMS membrane applications

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Design, simulation, and fabrication of a MEMs switched superconducting microstrip hairpin filter

Cited by 6 publications

References 9 publications

Three-Dimensional Superconducting Nanohelices Grown by He+-Focused-Ion-Beam Direct Writing

Three-Dimensional Superconducting Nanohelices Grown by He+-Focused-Ion-Beam Direct Writing

Vertical Growth of Superconducting Crystalline Hollow Nanowires by He+ Focused Ion Beam Induced Deposition

Review of the properties of gold material for MEMS membrane applications

Contact Info

Product

Resources

About

Three-Dimensional Superconducting Nanohelices Grown by He⁺-Focused-Ion-Beam Direct Writing

Three-Dimensional Superconducting Nanohelices Grown by He⁺-Focused-Ion-Beam Direct Writing

Vertical Growth of Superconducting Crystalline Hollow Nanowires by He⁺ Focused Ion Beam Induced Deposition