Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor

Bazaz, Shafaat A.; Khan, Fahimullah; Shakoor, Rana I.

doi:10.1016/j.sna.2010.12.003

Cited by 62 publications

(23 citation statements)

References 8 publications

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“…The advantages of ESA include high power efficiency, high dynamic performance, and a hysteresis-free input-output relationship [36][37][38]. However, its generated force is relative low, which lies at the nanonewton to millinewton level [11].…”

Section: Electrostatic Actuatormentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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Section: Electrostatic Actuatormentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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“…Microgripper with embedded two electrostatic comb drive actuators and two capacitive force sensors [74] Capacitive sensors can also be used for both the measurement of the fingers' positions and the gripping force. Bazaz et al [74] proposed a prototype of microgripper consisting of two comb drive actuators and two capacitive sensors that has these two properties ( Figure 18). Each finger was connected to a comb drive actuator and a capacitive sensor.…”

Section: From 2006: the Use Of Mems-based Microgrippers With Embeddedmentioning

confidence: 99%

An Overview on Gripping Force Measurement at the Micro and Nano-Scales Using Two-Fingered Microrobotic Systems

Régnier

2014

International Journal of Advanced Robotic Systems

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Two-fingered micromanipulation systems with an integrated force sensor are widely used in robotics to sense and control gripping forces at the micro and nano-scales. They became of primary importance for an efficient manipulation and characterization of highly deformable biomaterials and nanostructures. This paper presents a chronological overview of gripping force measurement using two-fingered micromanipulation systems. The work summarizes the major achievements in this field from the early 90s to the present, focusing in particular on the evolution of measurement technologies regarding the requirements of microrobotic applications. Measuring forces below the microNewton for the manipulation of highly deformable materials, embedding force sensors within microgrippers to increase their dexterity, and reducing the influence of noise to improve the measurement resolution are among the addressed challenges. The paper shows different examples of how these challenges have been addressed. Resolution, operating range and signal/noise ratio of gripping force sensors are reported and compared. A discussion about force measurement technologies and gripping force control is performed and future trends are highlighted.

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“…The other is the compact displacement amplification mechanism (DAM) with simple structure, especially for the device driven by the actuator without enough output displacement, such as piezoelectric stack actuator (Nah and Zhong 2007), electrostatic actuator (Millet et al 2003;Bazaz et al 2011), or chevron electrothermal actuator (Carlson et al 2007;Shivhare et al 2015). Being free of clearance, friction and assembly error, flexure-based compliant mechanisms are widely used to construct DAM, such as leverage mechanism (Jouaneh and Yang 2003), bridgetype mechanism (Lobontiu and Garcia 2003), Scott-Russell mechanism (Chang and Du 1998), and topology optimized displacement amplification mechanism (Arunkumar and Srinivasan 2006).…”

Section: Introductionmentioning

confidence: 99%

“…bridge-type mechanism, requires the full symmetry of the structure as well as bidirectional symmetric input forces/displacements. The requirement for the bidirectional symmetric input forces/displacements limits the scope of bridge-type mechanism, because in the field of micromanipulation, most of the actuators with one-dimensional output direction can only supply unidirectional movement under a certain driving condition, such as lateral comb electrostatic actuator (Bazaz et al 2011), arrays of electrostatic actuators (Bohringer et al 1996;Millet et al 2003), and chevron electrothermal actuator. Furthermore, for piezoelectric stack actuator, it is more convenient and stable for preload when fixed at one end, in which the symmetric bidirectional movement is transformed into the unidirectional movement as well (Sun et al 2014;Liang et al 2015).…”

Section: Introductionmentioning

confidence: 99%