Design, Structural and Electrostatic Analysis of Three MEMS Micro Accelerometers

Abstract

Three low-power MEMS micro-accelerometers were designed, the first with variable distance and the last with variable area. Then, electrostatic analysis and simulation by the finite element method was performed to show its behavior and performance. In the simulation and analysis the software COMSOL MULTIPHYSICS 5.1 was used. The results show that the variable area micro-accelerometer exhibits the best relationship between behavior and performance.