Various types of samples with nominal compositions of Ba 1¹x Ln x FeO 3¹¤ and BaFe 1¹x Ln x O 3¹¤ (Ln: lanthanoid or Y) were prepared and their phases were analyzed. The types of Ln and their substitutional amounts were clarified to obtain the cubic perovskite phase with a random arrangement of oxide ion vacancies, which have attracted interest as new hole-and oxide-ion-mixed conductors. Ln was classified into three groups based on its ionic radius: Large La was substituted for only the Ba site, whereas small Ln such as Y, Ho, Er, Tm, and Yb were substituted for only the Fe site. Ln with intermediate ionic radii, such as Nd, Sm, Eu, Gd, and Dy, could be substituted for both Ba and Fe sites. Results indicated that the differences in ionic radius between 12-coordinated Ln and Ba as well as between 6-coordinated Ln and Fe were responsible for the determination of substitutional sites. The ratio of the ionic radius of Ln 3+ to that of O 2¹ was also proposed to be a factor in the determination of substitutional sites, which is in agreement with the rigid sphere model. A cubic perovskite phase with a random arrangement of oxide ion vacancies was obtained for Ba 1¹x Ln x FeO 3¹¤ and BaFe 1¹x Ln x O 3¹¤ with a tolerance factor between 0.996 and 1.035 and between 1.008 and 1.035, respectively.