Abstract. We investigated Ne+ ions and Ne + n (n = 2 − 20) cluster ions desorbed from the surface of solid Ne by 1.0 keV Ar + ion impact. Kinetic energy analysis shows a considerably narrower energy distribution for the Ne + n (n ≥ 3) ions than for the Ne + n (n = 1, 2) ions. The dependence of ion yields on Ne film thickness indicates that cluster ions (n ≥ 3) are desorbed only from relatively thick films. We conclude that desorbed ions grow into large cluster ions during the outflow of deep bulk atoms to the vacuum.