Destructive Reliability Analysis of Electromagnetic MEMS Micromirror Under Vibration Environment

Fang, Xiao-Yong; Li, Xiuyuan; Hu, Kai-Ming; Yan, Ge; Wu, Jia-Hao; Zhang, Wen Ming

doi:10.1109/jstqe.2021.3124140

Cited by 12 publications

(10 citation statements)

References 35 publications

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“…Therefore, the research focus on reliability can be simplified to the micromirror chip only. According to the relevant literature, the vibration disturbance to MEMS devices in vehicles occurs in a band of 20 Hz~2000 Hz [24]. To analyze the deformation response in this frequency range, we perform simulations via the finite element method (FEM).…”

Section: Modal Analysismentioning

confidence: 99%

“…The flexure beams are much smaller than other parts, and they are crucial areas in the following analysis; therefore, the mesh of the slow flexure and fast flexure structure are divided by the way of refinement. According to the relevant literature, the vibration disturbance to MEMS devices in vehicles occurs in a band of 20 Hz~2000 Hz [24]. To analyze the deformation response in this frequency range, we perform simulations via the finite element method (FEM).…”

Section: Modal Analysismentioning

confidence: 99%

“…sions to realize a delicate design [20][21][22][23][24]. Nevertheless, silicon is still imperfect when it comes to large stretching, as a brittle material [31].…”

Section: Structure Designmentioning

confidence: 99%

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Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

et al. 2023

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The Micro-Electro-Mechanical-System (MEMS) micromirror has shown great advantages in Light Detection and Ranging (LiDAR) for autonomous vehicles. The equipment on vehicles is usually exposed to environmental vibration that may degrade or even destroy the flexure of the micromirror for its delicate structure. In this work, a mechanical low-pass filter (LPF) acting as a vibration isolator for a micromirror is proposed. The research starts with the evaluation of vibration influences on the micromirror by theoretical calculation and simulation. The results illustrate that mechanical load concentrates at the slow flexure of the micromirror as it is excited to resonate in second-order mode (named piston mode) in Z-direction vibration. A specific LPF for the micromirror is designed to attenuate the response to high-frequency vibration, especially around piston mode. The material of the LPF is a beryllium-copper alloy, chosen for its outstanding properties of elasticity, ductility, and fatigue resistance. To measure the mechanical load on the micromirror in practical, the on-chip piezoresistive sensor is utilized and a relevant test setup is built to validate the effect of the LPF. Micromirrors with or without the LPF are both tested under 10 g vibration in the Z-direction. The sensor output of the device with the LPF is 35.9 mV in piston mode, while the device without the LPF is 70.42 mV. The attenuation ratio is 0.51. This result demonstrates that the LPF structure can effectively reduce the stress caused by piston mode vibration.

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Section: Modal Analysismentioning

confidence: 99%

Section: Modal Analysismentioning

confidence: 99%

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Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

et al. 2023

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“…However, the time period is still relatively short to verify the lifetime reliability and deficient in mechanical experiment [5]. Therefore, other researchers have conducted extensive research on mechanical and electrical reliability with different theoretical models and test methods [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric MEMS fast steering mirror with high reliability for free-space laser communication

Wang,

Zhang,

Zhu

et al. 2024

Free-Space Laser Communications XXXVI

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This paper reports a highly reliable piezoelectric Micro Electro Mechanical System (MEMS) fast steering mirror (FSM) with large optical aperture (10 mm), which utilizes two-level-construction comprising a mirror plate and a actuator hidden beneath the mirror plate, achieving a high resonant frequency (>900 Hz) and a large quasi-static scanning range (4 mrad). The leverage structure is adopted not only to amplify the quasi-static deflection angle, but also to achieve a high fill factor (>50%). Moreover, compliant flexural structures are optimized to balance the stress to strengthen mechanical robustness. AlScN piezoelectric film is used as actuating material for high piezoelectric coefficient, high linearity and long-term stability. Through experimental verifications, the mirror has been proven to have high mechanical and thermal robustness, namely, withstands mechanical vibration (14.34g), shock (500g@2ms) and temperature cycling (-40° to 80°) without performance degradation. Meanwhile, the on/off at equal stress experiment further demonstrates the lifetime of the mirror to be more than 12.0E9 cycles.

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“…Dynamic Response of Electromagnetic MEMS micromirror at vibration time was obtained by constructing a conventional dynamic model [20]. In this study, conventional control systems were applied by modeling the micromirror as mass and spring.…”

Section: Introductionmentioning

confidence: 99%

Computational model for the nonlinear dynamic response of MEMS-based micromirror

Ertugrul¹,

Ersoy²,

Ragulskis³

2022

Vib. proced.

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In this study, it is aimed to perform Finite Element Analysis (FEA) of micromirror based on Micro-Electro-Mechanical Systems (MEMS) and to examine the nonlinear and dynamic responses of this system. Micromirror devices are indispensable, especially for optical systems and form the basis of them. In this work, dynamic and nonlinear responses of micromirror with 4 symmetric arms and one reflective surface were investigated. During the design and modeling, it is assumed that the upper and lower layers of the reflective surface have equal tensile and compressive stresses. The analysis of the system was obtained by applying a force of up to 30 GPa Prestressed on the reflective surface. The design and FEA of the micromirror system were made with the Comsol Multiphysics program. The nonlinear response of the analysis was carried out with the MATLAB program. This model, which has the most basic design of micromirror structures used in optical systems, is thought to be a source for a good examination of the nonlinear dynamic model and for understanding more complex structures.

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Destructive Reliability Analysis of Electromagnetic MEMS Micromirror Under Vibration Environment

Cited by 12 publications

References 35 publications

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror

Piezoelectric MEMS fast steering mirror with high reliability for free-space laser communication

Computational model for the nonlinear dynamic response of MEMS-based micromirror

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