Detachable Silicon Microneedle Stamps for Allergy Skin Prick Testing

Trautmann, Alain; Heuck, F; Denfeld, Ralf W.; Ruther, Patrick; Oliver, Paul

doi:10.1109/memsys.2006.1627829

Cited by 15 publications

(12 citation statements)

References 9 publications

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“…This etching method is also known as the BOSCH process 35. In contrast to out‐of‐plane arrays for dermatological applications 36–38 formerly developed in our group, very long probes with length of up to 8 mm are required to reach the area within the cortex targeted for recording and stimulation. Multiple electrodes arranged in 2D and 3D arrays are further necessary to obtain neural signals from neurons in a defined brain volume.…”

Section: Needle Technologymentioning

confidence: 99%

Recent Progress in Neural Probes Using Silicon MEMS Technology

Ruther

Herwik

Kisban

et al. 2010

IEEJ Transactions Elec Engng

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Extracellular recordings from the brain are the basis for the fundamental understanding of the complex interaction of electrical signals in neural information transfer. Going beyond wire electrodes and bundles of electrode wires such as tetrodes, multielectrode arrays based on silicon technologies are receiving growing attention, since they enable a pronounced increase in the number of recording sites per probe shaft. In this paper, recent innovations contributed by the authors to the development of probe arrays based on microelectromechanical system (MEMS) technologies within the EU-funded research project NeuroProbes are described. The resulting structures include passive electrode arrays based on single-shaft and four-shaft probes comprising nine planar electrodes per shaft with lengths of up to 8 mm. Further, active probe arrays with complementary metal-oxide-semiconductor (CMOS) circuitry integrated on the probe shaft, enabling the arrangement of 188 electrodes in two columns along a 4-mm-long probe shaft with an electrode pitch of only 40 µm, are described. These active probes were developed for an electronic depth control. Further, the paper reports assembly technologies for combining the probe arrays with highly flexible ribbon cables. Applications of the probes in in vivo experiments are summarized. 

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Section: Needle Technologymentioning

confidence: 99%

Recent Progress in Neural Probes Using Silicon MEMS Technology

Ruther

Herwik

Kisban

et al. 2010

IEEJ Transactions Elec Engng

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“…16,17) A micro flow channel has also been fabricated inside the Si microneedle structure to enable the drug solution to be supplied continuously from the backside of needle substrate. [18][19][20][21] Si has desirable mechanical properties such as a high Young's modulus of 130-170 GPa and a high fracture strength of 7 GPa. 22) In addition, the technology for fabricating sharppointed needles with a sub-micrometer curvature radius has already matured.…”

Section: Transdermal Ddcmentioning

confidence: 99%

Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors

Shikida

Hasegawa

Farisi

et al. 2021

Jpn. J. Appl. Phys.

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Since their early stages of development, micro-electro-mechanical systems (MEMS) have shown potential for breakthroughs in the fabrication of medical tools. The miniaturization of various devices using MEMS technology has enabled minimally invasive treatments and in situ measurements. In this paper, we introduce two advancements in MEMS applications in the medical field: (1) microneedle devices for brain activity evaluation, a transdermal drug delivery system, and biological fluid sampling; and (2) miniaturized MEMS sensors for monitoring the conditions inside blood vessels and respiratory organs. In addition, we provide a summary of MEMS sensors used in developing new drugs, detecting vital signs, and other applications.

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“…After fabrication, the probes are suspended on the wafer by thin struts. These struts serve as predetermined breaking points and allow the separation of the probes from the wafer without dicing [5].…”

Section: Microprobe Array With Low Impedance Electrodes and Highly Flmentioning

confidence: 99%

Microprobe Array with Low Impedance Electrodes and Highly Flexible Polyimide Cables for Acute Neural Recording

Kisban

Herwik

Seidl

et al. 2007

2007 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society

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This paper reports on a novel type of silicon-based microprobes with linear, two and three dimensional (3D) distribution of their recording sites. The microprobes comprise either single shafts, combs with multiple shafts or 3D arrays combining two combs with 9, 36 or 72 recording sites, respectively. The electrical interconnection of the probes is achieved through highly flexible polyimide ribbon cables attached using the MicroFlex Technology which allows a connection part of small lateral dimensions. For an improved handling, probes can be secured by a protecting canula. Low-impedance electrodes are achieved by the deposition of platinum black. First in vivo experiments proved the capability to record single action potentials in the motor cortex from electrodes close to the tip as well as body electrodes along the shaft.

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Detachable Silicon Microneedle Stamps for Allergy Skin Prick Testing

Cited by 15 publications

References 9 publications

Recent Progress in Neural Probes Using Silicon MEMS Technology

Recent Progress in Neural Probes Using Silicon MEMS Technology

Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors

Microprobe Array with Low Impedance Electrodes and Highly Flexible Polyimide Cables for Acute Neural Recording

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