Optics and Photonics for Advanced Dimensional Metrology 2020
DOI: 10.1117/12.2556797
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Detailed characterization of a hyperspectral snapshot imager for full-field chromatic confocal microscopy

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Cited by 7 publications
(8 citation statements)
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“…In addition, the bandwidth (Full-Width at Half Maximum) of the filter more than doubles from 7 nm to 17 nm. Recently, similar result were independently observed by Hann et al [30].…”
Section: Experimental Validation Using the Equivalent Monolayer Modelsupporting
confidence: 86%
“…In addition, the bandwidth (Full-Width at Half Maximum) of the filter more than doubles from 7 nm to 17 nm. Recently, similar result were independently observed by Hann et al [30].…”
Section: Experimental Validation Using the Equivalent Monolayer Modelsupporting
confidence: 86%
“…To make the images of the different wavelengths comparable to each other, the data set was finally normalized to the highest value of all channels. 9 5 Perpendicular Incidence of Light on the Sensor Figure 10(a) shows the corrected signal of channel 1 under perpendicular illumination using a wavelength of 914 nm. According to the manufacturer, the channel is most sensitive for this wavelength.…”
Section: Measurement Proceduresmentioning
confidence: 99%
“…[6][7][8] The investigated sensor addresses a wide range of applications such as agriculture, food inspection, or medical imaging. 9 With the presented characterization, a first impression can be gained as to whether or not these sensors are also suitable for quantitative spectral measurements, as they are necessary, for example, in the field of optical metrology.…”
Section: Introductionmentioning
confidence: 99%
“…4,5 They are also particularly susceptible to fabrication tolerances. 6,7 Another approach, proposed by Bacon 8 and Courtes et al, 9 relies on spatial sampling using a microlens array in an intermediate image plane. This allows one to generate and capture a spectrum for each aperture on a conventional image sensor.…”
Section: Introductionmentioning
confidence: 99%
“…One of the main advantages of the proposed sensing principle is a quite large freedom of choice concerning spatial and spectral sampling in arbitrary image patches. Furthermore, compared with the IMEC SRFA sensor investigated by Hahn et al, 6,7 the method is superior in the detection of spectral shifts, is less sensitive to manufacturing tolerances, does not necessarily need a pixelwise calibration, is more robust to varying ray angles, and does not require any further spectral filters for proper operation. However, the proposed method leads to broader spectral channels at a given spatial resolution.…”
Section: Introductionmentioning
confidence: 99%