2007
DOI: 10.1063/1.2757118
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Detecting dynamic signals of ideally ordered nanohole patterned disk media fabricated using nanoimprint lithography

Abstract: The authors have fabricated ideally ordered alumina nanohole patterned disk media via anodic oxidation and nanoimprint lithography with a thermoplastic resist. The ordered arrays of alumina nanoholes with 100nm pitch, filled with Co by electrodeposition, were created over a macroscopically large area on a hard-disk substrate using these industrially applicable nanofabrication technologies. Stable flight of a perpendicular magnetic head above the media and perpendicular magnetic anisotropy of the Co nanopillars… Show more

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Cited by 44 publications
(29 citation statements)
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“…With this method, 40 nm dots could be fabricated [57]. Another method, proposed by Oshima et al, is to combine anodized alumina nano-hole with NIL [58]. In this method, the long-range ordering in alumina nano-holes were enhanced by lithographically produced tracks.…”
Section: Bit-patterned Mediamentioning
confidence: 95%
“…With this method, 40 nm dots could be fabricated [57]. Another method, proposed by Oshima et al, is to combine anodized alumina nano-hole with NIL [58]. In this method, the long-range ordering in alumina nano-holes were enhanced by lithographically produced tracks.…”
Section: Bit-patterned Mediamentioning
confidence: 95%
“…Low-cost and versatile fabrication of functional nanostructures, for example for nanowires, nanocrystals or nanotubes, becomes of great importance in an increasing number of potential commercial devices [1-6]. In this context, the general approach of directed self-assembly (DSA) seems to be favoured by a high number of scientists and engineers because it uses natural properties and top-down methods to create nanostructures already positioned and organised.…”
Section: Introductionmentioning
confidence: 99%
“…These nanostructures offer a very large panel of applications including among others data storage with ferroelectric materials [1], sensors [2] and supercapacitors [3]. More specifically, porous AAO can be used to guide the growth of mono-crystalline nanowires by chemical vapour deposition (CVD).…”
Section: Introductionmentioning
confidence: 99%
“…[15][16][17][18][19][20] The size of such nanochannel arrays can be as large as 1 cm 2 , 21 and many potential applications are being realized recently. 22 The guiding nanohole arrays are fabricated by methods that change different physical or chemical properties of the Al. For example, when a Ga focused ion beam ͑FIB͒ is employed to fabricate the nanoholes by direct-ion writing, 16 geometric holes are created by physical sputtering while the chemistry of the Ga + -irradiated area is also changed due to accompanying ion implantation.…”
Section: Introductionmentioning
confidence: 99%