Detection and Removal of Spatial Mid-Frequencies in Sub-Aperture Finishing

Fähnle, Oliver; Mourad, Safer; Hauser, Karin; Meeder, Mark

doi:10.1364/oft.2010.owe4

Cited by 2 publications

(3 citation statements)

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“…This peak contributes a very small fraction of a nanometer to the total 1.5 nm RMS of the mid-frequency band and thus shows that "over-rastering" is an effective way of minimizing mid-spatial frequencies. This can be an alternative to the method proposed by Fähnle et al [13], using only one tool. Having a relatively large footprint gives us the added advantage of being insensitive to CNC positioning errors, which are two orders of magnitude smaller than the footprint.…”

Section: Power Spectral Densitymentioning

confidence: 93%

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HyDRa: polishing with a vortex

et al. 2013

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We present a hydrodynamic, deterministic polishing tool (HyDRa) based on the fluid-jet polishing (FJP) principle. In contrast to other FJP methods, the polishing flux is accelerated with pressurized air and then expelled at high velocity, forming a radial, grazing abrasive pattern that exerts no net force of the tool on the surface to be polished, since the vacuum and thrust forces that are created at the tool's output balance each other out. The grazing effect minimizes microroughness, making it appropriate for finishing high-quality surfaces. The principle of operation as well as polishing results of a series of small etalon plates are presented.

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Section: Power Spectral Densitymentioning

confidence: 93%

“…Similarly, to obtain the RMS one may integrate the PSD 2 in polar frequency coordinates. As is discussed in [13] the PSD 2 is preferable, since in the PSD 1 representation the amplitude of the peaks due to raster patterns is damped. Thus, we use the PSD 2 representation.…”

Section: Power Spectral Densitymentioning

confidence: 99%

HyDRa: polishing with a vortex

et al. 2013

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“…This peak adds a very small fraction of a nm to the total 1.5 nm RMS of the midfre quency band, demonstrating that "over-rastering" can be effective in minimizing mid-spatial frequencies. This represents an alternative to the approach proposed by Fähnle [15], using only one tool. A comparatively large footprint has the extra advantage of making our process insensitive to CNC positioning errors, which are two orders of magnitude smaller than the footprint size.…”

Section: Polishing Example: Psd and Polishing Of Fabry-perot Etalonsmentioning

confidence: 99%

HyDRa: Vortex Polishing with a Deterministic Hydrodynamic Radial Polishing Tool

Sohn¹,

Luna²,

Baraza³

et al. 2018

Abrasive Technology - Characteristics and Applications

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This work presents the deterministic hydrodynamic polishing system (HyDRa (HyDRa dynamic Radial Polishing Tool) based on a polishing tool developed at the Instituto de Astronomía, UNAM. HyDRa is one of several modern deterministic polishing techniques that allow for computer controlled finishing of complex optical surfaces. The HyDRa system is based on a hydrodynamic polishing tool that generates a variabledensity abra sive flow that makes possible the production of high-quality optical surfaces of diverse materials. The tool comprises several stacked operational stages that generate a graz wing abrasive flow with a predictable, zero-force erosion footprint on the workpiece that removes material. A recent innovation to the hydrodynamic polishing tool adds a switch ing capacity to the tool that allows the polishing action to be interrupted at will, without losing the stability of the operating parameters. This further increases the versatility and performance of the tool, since it is now possible to polish only the areas where the surface needs correction. Pulsed polishing also adds several techniques to this polishing method that further increase the system's versatility.

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Detection and Removal of Spatial Mid-Frequencies in Sub-Aperture Finishing

Cited by 2 publications

References 0 publications

HyDRa: polishing with a vortex

HyDRa: polishing with a vortex

HyDRa: Vortex Polishing with a Deterministic Hydrodynamic Radial Polishing Tool

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