2000
DOI: 10.1016/s0040-6090(00)01161-5
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Detection of deposition rate of plasma-polymerized films by quartz crystal microbalance

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Cited by 54 publications
(38 citation statements)
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“…The thickness of each monomer layer was controlled by plasma deposition time. [22] Characterization of the Bipolar Films Bipolar films composed of only a thin Aac film with thickness of 2 nm and a thin Aam film with thickness of 2 nm were analyzed by X-ray photoelectron spectroscopy (XPS, XSAM800, Kratos Ltd, UK) to determine the surface elemental compositions. The instrument was equipped with a monochromatic Mg K a (1 253.6 eV) X-ray source operated at 12 kV at a pressure of 5-7 Â 10 À9 mbar.…”
Section: Fabrication Of Bipolar Filmsmentioning
confidence: 99%
“…The thickness of each monomer layer was controlled by plasma deposition time. [22] Characterization of the Bipolar Films Bipolar films composed of only a thin Aac film with thickness of 2 nm and a thin Aam film with thickness of 2 nm were analyzed by X-ray photoelectron spectroscopy (XPS, XSAM800, Kratos Ltd, UK) to determine the surface elemental compositions. The instrument was equipped with a monochromatic Mg K a (1 253.6 eV) X-ray source operated at 12 kV at a pressure of 5-7 Â 10 À9 mbar.…”
Section: Fabrication Of Bipolar Filmsmentioning
confidence: 99%
“…Position settings of eight QCMs on the lower electrode are denoted as shown in Fig. 1(b) in ref [21]. Prior to plasma polymerization, both sides of eight QCMs were treated by plasma sputtering for 60 s under 100 W of RF power and 100 Pa of He pressure.…”
Section: Plasma Polymerization Of Monomersmentioning
confidence: 99%
“…We obtained good film-state of polymers under these conditions. The apparatus and procedure for determination of the deposition rate have been described previously [21]. Oscillating frequency of the QCM was measured by incorporating the QCM in a transistor-transistor logic electronic circuit described in ref.…”
Section: Plasma Polymerization Of Monomersmentioning
confidence: 99%
“…This method allows for solvent free deposition of a wide range of thin polymer films on the surface of most sensors including cantilever and quartz crystal microbalance (QCM) based sensors. 6 Plasma polymerization also offers excellent control over film thickness since it is directly proportional to polymerization time as confirmed by Kurosawa et al 7 A wide selection of monomers with many different functional groups can be used for plasma polymerization making it a very versatile technique. The choice of monomer naturally depends on the target analytes to be detected.…”
mentioning
confidence: 93%