Detection of Heart and Respiration Rate with an Organic-Semiconductor-Based Optomechanical MEMS Sensor

Abstract

We present a displacement-sensitive sensor comprising a microelectromechanical (MEMS) chip and organic optoelectronic components capable of measuring the heart and respiration rate on humans. The MEMS sensor relies on the inertial deflection of a small silicon oscillator. The readout of the deflection is optical and works via modulation of the light flux passing through the MEMS. Organic optoelectronics are used as light source and detector, since these offer a homogeneous light distribution and a more compact package in a future integration. Two types of MEMS, differing in their resonance frequency, were designed and characterised in combination with both organic and inorganic optoelectronics prior to measuring heart and respiration rate. Subsequently, by measurements on the neck, pulse and respiration rate were successfully measured.

Design and numerical performance analysis of a microgravity accelerometer with quasi-zero stiffness

“…Folded beam is one of the most common configurations in linear springs. Other examples of folded beam which was developed by W Hortschitz, were used in many MEMS devices, such as vibration sensor, inclination sensor, electric field strength sensor and so on [11][12][13][14][15][16], and most of them have the natural frequency above 100 Hz. Nonlinear springs have been increasingly studied as well, e.g.…”