Detection of Neutral Particles Desorbed by Ion Impact

Enatsu, Masao; Ueda, Kazuyuki

doi:10.1143/jjap.25.l346

Jpn. J. Appl. Phys.

1986

DOI: 10.1143/jjap.25.l346

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Detection of Neutral Particles Desorbed by Ion Impact

Masao Enatsu¹,

Kazuyuki Ueda²

Abstract: A detection method of neutral molecules ejected during ion impact is described. Ejected neutral CO-molecules were detected by a quadrupole mass spectrometer aided by beam blanking method using a micro-processor, and the desorption of a CO adsorbed Fee(111) single crystal surface was studied.

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Detection of Neutral Particles Desorbed by Ion Impact

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References 9 publications

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