Detection of Scratch on Transparent Plate with Strong Scattering Noise by Digital Holographic Technique

Abstract

We applied a digital holographic detection technique to detect the scratches on glass surfaces with scattering noise. In the experiment, scratches with widths of 1.67 µm were generated on the front sides of the glass slides, and three different gray levels were painted on the back sides of the glass slides to generate the scattering noise. It demonstrated that the digital holographic detection method can enhance the image contrast of the scratch under high scattering noise. The high defocus tolerance promises a detection process without optical focusing and thus benefits the high-speed automatic optical inspection.