Detection of secondary electrons in a multidipole plasma

Hershkowitz, N.; Goettsch, Randy L.; Chan, Chung; Hendricks, K.J.; Carpenter, R.T.

doi:10.1063/1.329880

Cited by 19 publications

(13 citation statements)

References 4 publications

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“…͑1͒. 10,11 It may be that these electrons are scattered elastically out of the main axial flow 6 -the scattering cross section in Ar is largest at Ϸ10 eV, while the electron distribution function is cutoff above the inelastic threshold so that electrons with energies just below that threshold should be scattered preferentially. The shoulder on the EϫB side of the distribution is always higher than that on the opposing side, giving a small residual EϫB drift.…”

Section: Resultsmentioning

confidence: 99%

Electron velocity distribution functions in a sputtering magnetron discharge for the E×B direction

Sheridan

Goeckner

Goree

1998

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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The electron velocity distribution function is measured for the EϫB ͑azimuthal͒ direction in a cylindrically symmetric, planar, sputtering magnetron discharge as a function of height above the cathode. Near the cathode, the distribution function is approximately a warm Maxwellian (T e Ϸ2 eV) shifted in the EϫB direction, indicating a strong azimuthal drift. Farther above the cathode, the distribution function is characterized by a cold (T e Ϸ0.5 eV), Maxwellian bulk with energetic, asymmetric tails.

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Section: Resultsmentioning

confidence: 99%

Electron velocity distribution functions in a sputtering magnetron discharge for the E×B direction

Sheridan

Goeckner

Goree

1998

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…The electron distribution function in DP-devices was often found to be bi-Maxwellian, [16][17][18][19][20] with temperature T ke Ͼ T e and partial density n ke Ͻ n e . The hotter component represents descendants of the injected primary electrons that provide the ionization.…”

Section: "Ebim…mentioning

confidence: 99%

Effects of charge depletion in dusty plasmas

2011

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The charge reduction effect is studied in dense dust clouds. The saturation currents of Langmuir probes are used to derive the density of ions and electrons, which are calibrated with the plasma oscillation method. The plasma potential inside the dust cloud is measured with an emissive probe, which also yields the floating potential in a heated nonemitting mode. The presence of the dust also affects the density and the plasma potential of the ambient plasma. The ion densities inside the dust cloud and in the ambient plasma are found equal, while the electron density is reduced inside the dust cloud. The measured potentials are compared with current models. Inclusion of the bi-Maxwellian distribution of the electrons leads to an improved description in the limit of low dust density. The strong increase of the floating and cloud potential for high dust density, predicted by the constant ion density model, is not confirmed.

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“…The first is the equilibration of the confined electrons with the more energetic unconfined electrons that include the primary electrons as well as the more numerous secondary electrons from the walls. 3,4 The second energy source is the energy with which the electrons are created. This work and ref.…”

Section: Introductionmentioning

confidence: 99%

Energy balance and plasma potential in low-density hot-filament discharges

Robertson

Knappmiller

Sternovsky

2006

IEEE Trans. Plasma Sci.

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Electron energy balance is shown to play an important role in determining the plasma potential in low-density hot-filament discharges. The confined electrons that are lost to the walls are those with energy just above the plasma potential, thus the electron energy loss rate is the product of the electron loss rate and the height of the potential barrier. The sources of the electron energy are the energy at creation plus the energy gained from equilibration with energetic, unconfined electrons. An experiment in a souppot plasma device demonstrates that the plasma potential has values that satisfy the energy balance equation. The ion loss rate affects the electron loss rate through the quasineutrality condition, thus collisions of ions play a role in determining the plasma potential by reducing the particle loss rates.

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Detection of secondary electrons in a multidipole plasma

Cited by 19 publications

References 4 publications

Electron velocity distribution functions in a sputtering magnetron discharge for the E×B direction

Electron velocity distribution functions in a sputtering magnetron discharge for the E×B direction

Effects of charge depletion in dusty plasmas

Energy balance and plasma potential in low-density hot-filament discharges

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