Detection of three-axis angles by an optical sensor

Saito, Yûsuke; Arai, Yoshikazu; Gao, Wei

doi:10.1016/j.sna.2008.12.019

Cited by 46 publications

(23 citation statements)

References 17 publications

(30 reference statements)

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“…Figure 10(a) shows a plot of the arctangent waveform directly from Eq. (2). Acquired waveforms exhibit a severe distortion.…”

Section: Resultsmentioning

confidence: 99%

“…Interferometers are usually used as measuring probes for a planar positioning system, because they offer the advantage of high resolution, but they suffer from bulkiness and sensitivity to measurement conditions such as air pressure, temperature, and humidity. (1,2) Planar positioning systems can also be patterned in capacitor mechanisms. Huang et al presented a microcapacitive position sensor for nanopositioning applications, which provided two linear position signals and one rotational position signal.…”

Section: Introductionmentioning

confidence: 99%

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Analytical Modeling and Experimental Assessment of Five-Dimensional Capacitive Displacement Sensor

2017

Sensors and Materials

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This paper presents studies on a capacitive incremental displacement microsensor particularly for micro/nanopositioning applications. An incremental capacitive microsensor is capable of achieving large-scale, high-precision X-Y linear positioning; however, some inevitable static errors and dynamic disturbances in reality affect the linearity of the X-Y signal in the form of roll, yaw, and pitch movements. To realize high-precision X-Y linear positioning, a symmetrical sensor modeling scheme and a novel signal processing scheme are developed to compensate for signal nonlinearity caused by rotational disturbances. At the same time, roll, yaw, and pitch signals are decoupled from X-Y linear signals for possible feedback control purposes. A printed circuit board microsensor prototype for testing is constructed with a design featuring a 20 mm linear stroke, a 2 mm electrode pitch, and a 0.5 mm gap distance. The measured X-Y signal nonlinearity is decreased to 0.5% with a 4 mm stroke, while signal errors of rotational disturbances are no larger than 0.01°. The feasibility of a five-dimensional displacement measurement, including a large stroke, the high-precision acquisition of X-Y linear displacement, and roll, yaw, and pitch movements, is experimentally validated.

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“…Figure 10(a) shows a plot of the arctangent waveform directly from Eq. (2). Acquired waveforms exhibit a severe distortion.…”

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Analytical Modeling and Experimental Assessment of Five-Dimensional Capacitive Displacement Sensor

2017

Sensors and Materials

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show abstract

“…Among the various measurement schemes [1][2][3][4][5][6][7][8][9], the measurement angle ranges and resolutions are all different, and most of the methods have a limited tradeoff relationship between them. It is desirable to have an accurate angle measurement resolution over a wide-angle measurement range.…”

Section: Resultsmentioning

confidence: 99%

“…To achieve precision control for nanometer resolution, optical remote measurements have the advantage of being non-contact, and are easily performed using an optical interferometer. There are various optical methods of precision angle measurement, such as using surface plasmon resonance (SPR), total internal reflection (TIR), Fabry-Perot resonator, white-light interferometry, and imaging displacement sensing [1][2][3][4][5][6][7][8][9]. In optical metrology, the amplitude or phase of a reflected and refracted probe light is dependent on an incident angle in the optical transducer.…”

Section: Introductionmentioning

confidence: 99%

A Birefringent-Refraction Transducer for Measuring Angular Displacement Based on Heterodyne Interferometry

Twu

Wang

2016

Applied Sciences

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Abstract:In this paper, an optical angle sensor with a birefringent transducer for measuring angular displacement based on a heterodyne interferometry is proposed. The achievable repeatability and linearity provide sufficient evidence for the practical use. As a result, a resolution of 5.8ˆ10´6 with a dynamic range of 5˝has been achieved by utilizing a KTP (potassium titanyl phosphate) plate immersed in a high refractive index oil with refractive index of 1.7.

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“…And there have been many researches on the method of calculating three angles of pitch, roll, and yaw, [21][22][23] which are often measured by laser auto collimation method. Although the three angles had been measured, the process was sophisticated.…”

Section: Introductionmentioning

confidence: 99%

A novel image analysis method for rotational motion of circular feature based on perspective projection

Liu

Zhao

2015

The Imaging Science Journal

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Circular feature has been widely applied in recognising moving object and estimating its position and orientation. Based on the principle of perspective projection, the rotational motion of circular feature was analysed. According to whether the rotational motion occurred in the plane of circular feature, the rotational motion could be classified into two types: in-plane rotation and non-in-plane rotation. For the convenience of computation, we set the camera's initial position and orientation. The optical axis of camera was set perpendicular to the plane of circular feature. We analysed the perspective distortion of the circular feature. Additionally, based on the geometrical reasoning, we also proposed the method of computing the rotation angles. Finally, some experiments were carried to verify correctness and feasibility of the computing method. The results showed that the measurement of rotation angle could achieve better performance though the error existed. The maximum value of errors was only 0?4u. The average errors and the standard deviations of errors were also small.

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Detection of three-axis angles by an optical sensor

Cited by 46 publications

References 17 publications

Analytical Modeling and Experimental Assessment of Five-Dimensional Capacitive Displacement Sensor

Analytical Modeling and Experimental Assessment of Five-Dimensional Capacitive Displacement Sensor

A Birefringent-Refraction Transducer for Measuring Angular Displacement Based on Heterodyne Interferometry

A novel image analysis method for rotational motion of circular feature based on perspective projection

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