2002
DOI: 10.1109/jsen.2002.806215
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Detection of toxic gases by a tin oxide multisensor

Abstract: A tin oxide multisensor with eight sensor elements has been utilized to detect different gases that are emitted from the chemical industry. The different sensors have been prepared using the RF reactive sputtering technique. Some components of this multisensor were doped with Pt and Cr by sputtering.Each sensor has been characterized by electrical measurements for detection of atmospheric pollution (nitrogen dioxide, carbon monoxide, toluene, and propanal). The detected gases are toxic and their extreme concen… Show more

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Cited by 24 publications
(9 citation statements)
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“…Chemical-resistive sensors with metal oxides as a sensitive layer have been commonly used for the detection of toxic agents due to their high sensitivity and stability [1]. Tungsten oxide has been extensively studied as sensitive layer for gases due to its high capacity to detect different analytes, such as NO2 [2].…”
Section: Introductionmentioning
confidence: 99%
“…Chemical-resistive sensors with metal oxides as a sensitive layer have been commonly used for the detection of toxic agents due to their high sensitivity and stability [1]. Tungsten oxide has been extensively studied as sensitive layer for gases due to its high capacity to detect different analytes, such as NO2 [2].…”
Section: Introductionmentioning
confidence: 99%
“…ating on a very wide range often needs the setting of scaling factors [5][6][7]. In this sense, the limitations of traditional ADCbased front-end can be overcome through a resistance-to-time (or frequency) conversion (RTC) [8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Commonly used semiconductor materials are oxides of metals such as zirconium (ZrO 2 ), [1] tungsten (WO 3 ), [2] and tin (SnO 2 ) [3]. These sensors have been applied primarily to the detection of oxygen, and their principles of operation rely on measuring either resistance change (SnO 2 ), conductance (WO 3 ), or current/voltage change (ZrO 2 ) across the semiconductor.…”
Section: Introductionmentioning
confidence: 99%
“…Applications of these sensors to NO x measurement have been examined. Both WO 3 and SnO 2 sensors show good sensitivity to NO x at relatively low temperatures (200-300°C) when compared with ZrO 2 sensors that operate at a temperature above 500°C. In general, typical problems of metal oxide sensors are poor sensitivity, nonlinear response, long-term drift, and slow response/recovery time.…”
Section: Introductionmentioning
confidence: 99%
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