1991
DOI: 10.1366/0003702914336273
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Detection of Trace Concentrations of Column III and V Hydrides by Laser-Induced Breakdown Spectroscopy

Abstract: The measurement of trace concentrations (1-400 ppm) of polyatomic molecular impurities in helium was investigated by laser-induced breakdown spectroscopy (LIBS). For the Column III and V hydrides such as B2H6, PH6, and AsH3, the detectability limits with the present apparatus were determined to be 1, 3, and ∼1 ppm, respectively. It is expected that resorting to synchronous detection techniques will improve the sensitivity of LIBS for this application by as much as an order of magnitude.

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Cited by 28 publications
(5 citation statements)
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“…Cheng et al [35] has studied the measurement of metal hydrides; phosphine (PH 3 ), arsine (AsH 3 ) and diborane (B 2 H 6 ) concentrations, (1-400 mg/L), in helium gas standard at low pressures. The detection limits for phosphine, arsine and diborane were determined to be 1.0, 3.0, and 1.0 mg/L by volume, respectively.…”
Section: Introductionmentioning
confidence: 99%
“…Cheng et al [35] has studied the measurement of metal hydrides; phosphine (PH 3 ), arsine (AsH 3 ) and diborane (B 2 H 6 ) concentrations, (1-400 mg/L), in helium gas standard at low pressures. The detection limits for phosphine, arsine and diborane were determined to be 1.0, 3.0, and 1.0 mg/L by volume, respectively.…”
Section: Introductionmentioning
confidence: 99%
“…The majority of the LIBS studies have involved solid samples (e.g., paper, soils, paint, metals, steel); LIBS analysis of gaseous samples have been reported for the detection of F, Cl, S, P, As, and Hg in air and column III, V hydrides (e.g., B 2 H 6 , PH 3 ). The intent of the studies was the measurement of trace amounts of analytes in hostile environments and gas impurities for the hydride work. Hg was detected at the parts per billion level in air using a photodiode array detection system which recorded single-shot spectra over a range of 20 nm .…”
mentioning
confidence: 99%
“…For example, concerning phosphorus detection during steel analysis, Sturm claimed a LOD of 9 ppm [47]. Cheng claimed a LOD of 3 ppm in the detection of PH 3 in helium [48] and concerning the detection of phosphorus in air, Radziemsky claimed a LOD of 1.2 ppm [49]. In our study, oligonucleotides deposits on polyimide (and DNA micro-arrays) are nonhomogeneous thin layers (thickness of nucleic acids deposits on polyimide ≤10 nm): it is more judicious to express our LOD in atoms/cm 2 .…”
Section: Statistical Data Analysismentioning
confidence: 99%