Detection of Ultrasonic Signal Using Polarized Homodyne Interferometer with Avalanche Detector and Electrical Filter

Abdelrehim, Tamer; Raouf, M. Helmy A.

doi:10.1007/s12647-013-0054-0

Cited by 7 publications

(1 citation statement)

References 18 publications

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“…Optical techniques have long been crucial tools in the nondestructive characterization of materials and devices [1][2][3][4][5]. Among them, ellipsometry which has been used to study thin film properties for more than a century is still a viable technique today [6][7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements

Srisuwan

Sirisathitkul

Danworaphong

2014

MAPAN

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We design and build a photometric ellipsometer that can be adjusted or modified to match specific needs for different experiments. To validate our setup, we test the system with glass substrates at multiple incident angles from 30°to 70°. The experimental data can then be fitted to the standard theoretical model for ellipsometry with a single interface, allowing the amplitude ratio (tan W) and the phase difference (D) to be evaluated as fitting parameters. As a result, we obtain the refractive indices of glass as 1.44-1.55 depending on the backing material. By the same means, it is also feasible to derive thicknesses of silicon oxide films. The resulting thicknesses are in good agreement with those determined by a commercial ellipsometer with the minimum deviation of 0.2 %.

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Section: Introductionmentioning

confidence: 99%

Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements

Srisuwan

Sirisathitkul

Danworaphong

2014

MAPAN

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A Precision Ultrasonic Phase Velocity Measurement Technique for Liquids

Joshi

Gupta

Kumar

et al. 2013

MAPAN

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Homodyne laser vibrometer modified by an LCVR for measurement at the nanometer level

Xinkang

Wang

et al. 2022

Appl. Opt.

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The existence of periodic nonlinear error restricts the performance of the homodyne laser vibrometer in sub-fringe amplitude vibration measurement. A homodyne laser vibrometer with nanoscale-amplitude detectability by using a liquid crystal variable retarder (LCVR) is proposed. The LCVR introduces an extra variation of optical path difference larger than the laser wavelength to acquire a full ellipse so that the nonlinearity correction parameters could be pre-extracted. The experiments showed that the nonlinear error could be well suppressed with the correction process based on the pre-extracted parameters, and the detectable minimum amplitude is less than 1 nm. In addition, measurement of vibration with the reflectivity of measured targets down to 0.048% was achieved with an automatic-gain-control module.

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Detection of Ultrasonic Signal Using Polarized Homodyne Interferometer with Avalanche Detector and Electrical Filter

Cited by 7 publications

References 18 publications

Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements

Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements

A Precision Ultrasonic Phase Velocity Measurement Technique for Liquids

Homodyne laser vibrometer modified by an LCVR for measurement at the nanometer level

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