1979
DOI: 10.1080/713819947
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Détermination du Critère D'arrêt Pour le Maximètre Monochromatique, Système de Contrôle Optique de Couches Minces Multidiélectriques

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“…Indeed, the realization of a multilayer is necessarily tainted with fabrication errors which are related to the deposition technology, to the thickness control technique (optical, quartz, stopwatch ...) and the multilayer design itself [58]. The basic principle for optical control of thin solid film deposition [59] is that for a thin layer illuminated at a given controlled wavelength λ c , extremum in the transmission is achieved whenever the optical thickness ne is a multiple of a quarter of this wavelength with n(λ c )e = pλ c /4, p being the number of extremum occurrences. This result remains true if the thickness increases on a multilayer already manufactured, provided that it is of real admittance.…”
Section: Introductionmentioning
confidence: 99%
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“…Indeed, the realization of a multilayer is necessarily tainted with fabrication errors which are related to the deposition technology, to the thickness control technique (optical, quartz, stopwatch ...) and the multilayer design itself [58]. The basic principle for optical control of thin solid film deposition [59] is that for a thin layer illuminated at a given controlled wavelength λ c , extremum in the transmission is achieved whenever the optical thickness ne is a multiple of a quarter of this wavelength with n(λ c )e = pλ c /4, p being the number of extremum occurrences. This result remains true if the thickness increases on a multilayer already manufactured, provided that it is of real admittance.…”
Section: Introductionmentioning
confidence: 99%
“…Provided that the deposition rate v = de/dt is quasi-constant, the resulting extrema are then identical to those of T(e, λ c ). To spot these extrema, we carry out a real time derivation of the control signal and we stop the deposit as soon as the derivative goes through a zero [59].…”
Section: Introductionmentioning
confidence: 99%