Determination of Evaporation Rate and Vapor Pressure of Organic Monomers Used for Vapor Deposition Polymerization

Takahashi, Yoshikazu; Matsuzaki, Kanenori; Iijima, Masayuki; Fukada, Eiicchi; Tsukahara, Sonoko; Murakami, Yukimasa; Maesono, Akikazu

doi:10.1143/jjap.32.l875

Cited by 31 publications

(13 citation statements)

References 12 publications

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“…The disadvantage of VDP is that the deposition rate is often low because the monomer supply rates strongly depend on the vapor or the sublimation pressures of monomers, although these are not usually high. [17][18][19] Recently, we reported an alternative technique for the deposition of PI film inside a microscopic space using supercritical carbon dioxide (scCO 2 ). This allowed the deposition of PI films synthesized from PMDA and ODA of Kapton-type PI monomers onto the walls inside the trenches (width: 5 lm, depth 30 lm).…”

Section: Introductionmentioning

confidence: 99%

Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic‐scale trenches in supercritical carbon dioxide

Haruki

Oda

Wasada

et al. 2016

J of Applied Polymer Sci

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The phase appearance during the synthesis of fluorinated polyamic acid (PAA) from 2,2-bis(3,4-anhydrodicarboxyphenyl)-hexafluoropropane (6FDA) and 2,2 0 -bis(trifluoromethyl)24,4 0 -diaminobiphenyl (TFDB) in supercritical carbon dioxide (scCO 2 ) was investigated to obtain fundamental data for the deposition of fluorinate polyimides (PI) using scCO 2 . All polymerizations were carried out at 30 MPa for 60 min. The experimental temperatures ranged from 50 to 70 8C, and each of the monomer concentrations ranged from 0.67 3 10 25 to 3.3 3 10 25 mol cm 23. The holding time of the transparent phases, which was the time from the beginning of the polymerization to the appearance of a turbid phase, was increased with either a decrease in the polymerization temperature or a decrease in the initial monomer concentration. The holding time of the fluorinated PAA was longer than that of the monomers of Kapton-type PAA. The deposition of PI into the microscopic-scale trenches that had formed on the silicon wafer was successful in scCO 2 .

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Section: Introductionmentioning

confidence: 99%

Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic‐scale trenches in supercritical carbon dioxide

Haruki

Oda

Wasada

et al. 2016

J of Applied Polymer Sci

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“…(4,5) Two types of monomer are evaporated onto the surface of a substrate in a vacuum chamber in VDP. (6) Many types of monomer are used for coating the PI thin films, e.g., Usui et al reported the characterization of a PI thin film prepared by coevaporation with perylenetetracarboxylic dianhydride and diaminododecane. (7) In addition, the quartz crystal microbalance (QCM) is one of the sensor devices that enable the measurement of nanogram-order changes in mass on the surface of a quartz crystal by the observation of frequency shifts.…”

Section: Introductionmentioning

confidence: 99%

Gas Adsorption Performance of Organic Thin Films Prepared by Plasma-Assisted Vacuum Evaporation with Polyimide Precursors

2010

Sensors and Materials

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“…2) The weight loss, given by W , is plotted against the temperature, T , which gives d W/dT or d W/dt (i.e. the rate of change with time).…”

Section: Introductionmentioning

confidence: 99%

Dynamic Encoder/Decoder Based on Fiber Bragg Gratings for Optical Security System

Peng¹,

Peng²,

Lin³

et al. 2004

Jpn. J. Appl. Phys.

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Thermogravimetry (TG) measurements taken at pressures ranging from 10 −1 to 10 −3 Pa are used to calculate the vapor pressure of pyromellitic dianhydride (PMDA) and 4,4 -oxidianiline (ODA). The vapor pressure calculated for PMDA is closely agrees with to those reported by Pethe et al., Elshazly and Salem. For ODA, the calculated vapor pressure fits exactly on the curve obtained by Salem. The enthalpy is also calculated. The activation energy of desorption is found to be nearly equal to the enthalpy. The adsorption and desorption rates for both PMDA and ODA at various substrate temperatures are also observed. The mean adsorption time, τ calculated for ODA is several orders of magnitude larger than that for PMDA. 1:1 doses of ODA and PMDA therefore produce imine bonds which lead to the formation of thermally unstable films.

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Determination of Evaporation Rate and Vapor Pressure of Organic Monomers Used for Vapor Deposition Polymerization

Cited by 31 publications

References 12 publications

Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic‐scale trenches in supercritical carbon dioxide

Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic‐scale trenches in supercritical carbon dioxide

Gas Adsorption Performance of Organic Thin Films Prepared by Plasma-Assisted Vacuum Evaporation with Polyimide Precursors

Dynamic Encoder/Decoder Based on Fiber Bragg Gratings for Optical Security System

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