2007
DOI: 10.1016/j.tsf.2007.03.037
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Determination of optical constants and thicknesses of In2O3:Sn films from transmittance data

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Cited by 84 publications
(25 citation statements)
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“…Post-deposition annealing in nitrogen has been shown to produce more conductive and less transparent films due to increased oxygen vacancy (V o ) defects [128]. On the other hand, less conductive and more transparent films are produced by annealing ITO in an oxygen ambient [128]. In our own experiments, we have observed significant changes in the dielectric function of e-beam evaporated ITO films annealed in different ambient environments, as shown in Fig.…”
Section: Semiconductorsmentioning
confidence: 69%
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“…Post-deposition annealing in nitrogen has been shown to produce more conductive and less transparent films due to increased oxygen vacancy (V o ) defects [128]. On the other hand, less conductive and more transparent films are produced by annealing ITO in an oxygen ambient [128]. In our own experiments, we have observed significant changes in the dielectric function of e-beam evaporated ITO films annealed in different ambient environments, as shown in Fig.…”
Section: Semiconductorsmentioning
confidence: 69%
“…Sputtering and laser ablation techniques have reliably produced quality films of ITO [127]. Post-deposition annealing in nitrogen has been shown to produce more conductive and less transparent films due to increased oxygen vacancy (V o ) defects [128]. On the other hand, less conductive and more transparent films are produced by annealing ITO in an oxygen ambient [128].…”
Section: Semiconductorsmentioning
confidence: 99%
“…refractive index, dielectric constant and absorption coefficient, over a wide wavelength (k) range and optical band gap values of thin films, is crucial for optimizing their optical and electrical properties especially for solar cell applications. Therefore, determination of the optical constants of e-beam evaporated absorbing AIS thin films, both as-deposited and annealed samples at different ambient temperatures, was performed by transmission measurement, since the optical transmission measurement at a specific wavelength spectrum is a simple and effective experimental method for this purpose [12][13][14][15]. Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Tin-doped indium oxide (In 2 O 3 :Sn) or ITO, as a typical transparent conducting oxide (TCO), has received extensive studies for its use in applications such as flat panel displays and solar cells [1][2][3]. In preparing TCOs, In 2 O 3 is always treated as a substrate material, while Sn is considered an adjusting element to obtain low resistivity (b200 μΩ cm) and high transmittance (N90%) in the visible light range of the spectrum [4,5].…”
Section: Introductionmentioning
confidence: 99%