Determination of the optical constants of fine grained diamond layers on silicon substrates using curve-fitting procedures

Stenzel, Olaf; Petrich, Ralf; Roth, S.; Mainz, B.; Scharff, W.

doi:10.1016/0925-9635(93)90207-i

Cited by 7 publications

(1 citation statement)

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“…10,11 Also, to represent the optical parameters, we used the same functions which Stenzel and co-workers introduced. 10 We have obtained very good fit to the measured spectra, and the validity of this procedure is confirmed by the good agreement of the fitted film thickness with the SEM determined one. The values of the fitted rms roughness for the diamond films deposited at three different methane concentrations are shown in Fig.…”

Section: Resultssupporting

confidence: 70%

Field emission characteristics of defective diamond films

Kim

Lee

Song³

et al. 1998

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Section: Resultssupporting

confidence: 70%

Field emission characteristics of defective diamond films

Kim

Lee

Song³

et al. 1998

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Microstructure Evolution and Defect Incorporation in Highly Oriented and Textured CVD Diamond Films

Kaenel

Stiegler

Blank

et al. 1996

Phys. Stat. Sol. (a)

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A series of highly oriented and textured microwave CVD diamond films, where only the deposition time was varied, was deposited on silicon wafers in order to follow the evolution of the microstructure and defect content with film thickness. SEM, XRD, Raman spectroscopy, luminescence measurements, and ESR were applied to determine the microstructure and the defect density. It is shown that the growth of highly oriented and textured film proceeds in two stages. The first is characterized by marked changes of the microstructure (size, orientation, and shape of the grains) which directly influence the generation of defects. The second stage, which begins as soon as the film surface is covered with (100) tiles, leads to minor changes in the microstructure and defect incorporation. The defect-related part of the Raman spectrum has been decomposed into two contributions, the D-band which mainly responds to grain boundary defects, and the G-band which is more sensitive to volume defects. ESR measures volume defects, grain boundaries provide only a minor contribution. In this respect, ESR and Raman G-band are similar. (111) growth sectors produce defect densities which are three to four times higher than their (100) counterparts. The thermal conductivity is shown to depend not only on the grain boundary density but also on bulk defects. Optical transparency in the visible range is strongly affected by surface roughness, however, using a new method, it has been possible to determine an absorption coefficient for the second stage which is consistent with recently published literature data.

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Modeling of transmittance, reflectance and scattering of rough polycrystalline CVD diamond layers in application to the determination of optical constants

Petrich

Stenzel

1994

Optical Materials

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Determination of the optical constants of fine grained diamond layers on silicon substrates using curve-fitting procedures

Cited by 7 publications

References 1 publication

Field emission characteristics of defective diamond films

Field emission characteristics of defective diamond films

Microstructure Evolution and Defect Incorporation in Highly Oriented and Textured CVD Diamond Films

Modeling of transmittance, reflectance and scattering of rough polycrystalline CVD diamond layers in application to the determination of optical constants

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