1973
DOI: 10.1007/bf00604492
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Determination of the saturated vapor pressure of copper, titanium, and vanadium by atomic absorption

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“…In our experimental conditions, deposition temperature is lower than the melting point of pure copper (1085 C). While its saturated vapor pressure at 722 C is 10 −8 Torr, 28 we speculate that gas-solid phase reaction has taken place, that is, copper diffused from the substrate to the gas phase and re-crystallized at the solid-gas interlayer. As the throughhole restricts the copper gas diffusion to the outside of the mask, the gaseous copper can easily reach critical saturation to motivate phase change.…”
Section: Resultsmentioning
confidence: 99%
“…In our experimental conditions, deposition temperature is lower than the melting point of pure copper (1085 C). While its saturated vapor pressure at 722 C is 10 −8 Torr, 28 we speculate that gas-solid phase reaction has taken place, that is, copper diffused from the substrate to the gas phase and re-crystallized at the solid-gas interlayer. As the throughhole restricts the copper gas diffusion to the outside of the mask, the gaseous copper can easily reach critical saturation to motivate phase change.…”
Section: Resultsmentioning
confidence: 99%