Determination of the True Young's Modulus of Pb(Zr_0.52Ti_0.48)O₃ Films by Nanoindentation: Effects of Film Orientation and Substrate

Abstract

PZT films were deposited by the sol‐gel method on platinized silicon substrates with silicon nitride and silicon oxide structural layer materials. The crystalline orientations of the PZT films were controlled by both a chelating agent and pyrolysis temperature. A nanoindentation CSM (continuous stiffness measurement) technique was utilized to characterize the Young's moduli of these PZT films. It was found that the measured moduli of PZT films on the two types of substrates showed similar orientation dependence (E001 > E111>E(110,111)) but distinct values, which indicated a clear substrate effect. By using a new model of film indentation, we were able to decouple the effects of film orientation and structural layer type on the Young's modulus.

Structural and nanomechanical properties of sol–gel prepared (K, Na)NbO3 thin films

“…8b) and hardness (Fig. 9b) on Pt/SiO 2 /Si substrate were extracted using following parameter values (Table 1) [42] The our obtained results show modulus (100 and 71 GPa) and hardness (7.5 and 4.5 GPa) values of Pt and KNN films with different thicknesses 30 and 100 nm, respectively, we compared with same results previously reported work. [28] It should be noted that the difference of thickness of composite film/substrate systems of KNN (~200 nm)/Pt (~50 nm) [28] and KNN(~100 nm)/Pt (~30 nm) will not result in significant change of their mechanical properties.…”

“…data) was fitted by Z–P model, from which the modulus E f (100 GPa) of SiO 2 film was extracted. The values of parameters (Table ), which were used in calculation according to selected regression model (Newton method) equal E Si (173 GPa), Poisson's ratios for SiO 2 (0.17) and Si (0.28) . The Pt film (~30 nm) did not influence the composite Pt/SiO 2 /Si modulus and hardness.…”

“…The values of parameters (Table 2), which were used in calculation according to selected regression model (Newton method) equal E Si (173 GPa), Poisson's ratios for SiO 2 (0.17) and Si (0.28). [42][43][44] The Pt film (~30 nm) did not influence the composite Pt/SiO 2 /Si modulus and hardness. Pt modulus and hardness was 168-173 and 4-4.5 GPa, respectively.…”

“…The KNN film modulus was lower ( E f = 71 GPa) in comparison with modulus of Pt/SiO 2 /Si substrate ( E s = 100 GPa). The SiO 2 film modulus of around 85 and 80 GPa was obtained using O–P method and Z–P model, respectively …”

Temperature Dependent Mechanical Property of PZT Film: An Investigation by Nanoindentation

“…Because PZT films were usually experienced to concentrated electric field during working, their polarization response at nanoscale has got extensive researches by using Piezoelectric Force Microscopy (PFM) [ 4 ]. Meanwhile, select works concerning its mechanical property were also conducted [ 5 – 9 ], as understanding the mechanical property of PZT films is very important for the design and the lifetime assessment of PZT film devices [ 10 , 11 ]. For instance, the electromechanical coefficients of PZT films such as piezoelectric constant (d 33 and d 31 ) depended on their mechanical property [ 10 , 12 ], and these are the key parameters for designing PZT film devices [ 3 ].…”