2014
DOI: 10.1016/j.apsusc.2014.09.174
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Determination of the valence band structure of an alkali phosphorus oxynitride glass: A synchrotron XPS study on LiPON

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Cited by 17 publications
(13 citation statements)
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“…On the other hand, the shoulder observed at higher binding energies corresponds to nitrogen bonded to three phosphorus atoms, >N-. The energy difference between doubly bonded (Nd) and triply bonded (Nt) nitrogen was fitted to be 1.5 eV, as reported before [5,43]. XPS peak position shifts observed in the samples are due to charging effects related to the electronically insulating nature of these oxides [42,44].…”
Section: Stability Of Deposited Films To Air Exposurementioning
confidence: 91%
“…On the other hand, the shoulder observed at higher binding energies corresponds to nitrogen bonded to three phosphorus atoms, >N-. The energy difference between doubly bonded (Nd) and triply bonded (Nt) nitrogen was fitted to be 1.5 eV, as reported before [5,43]. XPS peak position shifts observed in the samples are due to charging effects related to the electronically insulating nature of these oxides [42,44].…”
Section: Stability Of Deposited Films To Air Exposurementioning
confidence: 91%
“…The tunable photon energy at the synchrotron offers depth‐dependent information at buried interfaces unachievable with conventional XPS. [ 305–307 ] Hard XPS (known as HAXPES or HXPS) experiments operate at energy a few times higher than lab XPS. The high incident energy allows access to deeper core levels with additionally a larger penetration depth for bulk sensitivity (up to 50 nm).…”
Section: Interface‐sensitive Techniquesmentioning
confidence: 99%
“…SXPS was used to determine the valence band structure of LiPON solid‐state electrolyte commonly used in thin‐film batteries. [ 305 ] It was concluded that N 2p states are responsible for the top of the valence band. As a result, the N content in LiPON layers may affect the energy band alignment with cathode materials.…”
Section: Interface‐sensitive Techniquesmentioning
confidence: 99%
“…It was found that the coexistence of different silane molecules can be achieved nondestructively by using energy and angle‐resolved SR–XPS. As another case of study, LiPON (lithium phosphorus oxynitride), as an ionic thin film battery, was studied by Schwöbel et al With respect to this fact that the ionic conductors should demonstrate very low electronic conductivity, it is important to study the valence band of these structures. Applying SR–XPS, it is possible to study the atomic orbital and valence band, in the depth of these multielemental structures.…”
Section: X‐ray Photoelectron Spectroscopymentioning
confidence: 99%