Determination of yield ratios of elastically backscattered electrons for deriving inelastic mean free paths in solids

Varga, D.; Kövér, L.; Tóth, J.; Tőkési, K.; Lesiak, B.; Jablonski,; Robert, C.; Gruzza, B.; Bideux, L.

doi:10.1002/1096-9918(200008)30:1<202::aid-sia798>3.0.co;2-9

Cited by 3 publications

(1 citation statement)

References 13 publications

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“…In calculating yields of electrons backscattered elastically from solid surfaces, the effect of multiple scattering was modelled by Monte Carlo simulations, 8,9 applying differential scattering cross-sections derived by using the relativistic partial wave expansion method (with an analytical approximation to the Dirac-Hartree-Fock-Slater atomic field) 10 and bulk IMFP values obtained directly from experimental optical data in the frame of the dielectric function model. 11 -13 The values of the elastic cross-sections and IMFP were practically the same as the NIST 14 and Tanuma et al 15 data, respectively.…”

Section: Monte Carlo Simulationsmentioning

confidence: 99%

Energy shift and broadening of the spectra of electrons backscattered elastically from solid surfaces

Varga

Tőkési

Berényi

et al. 2001

Surface & Interface Analysis

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In the present work our experimental results on the energy shifts and energy widths (full width of half-maximum) of the quasi-elastic peaks (1-5 keV) obtained using a high-energy-resolution electron spectrometer and different (C, Si, Ni and Au) surfaces are compared with those calculated by assuming single elastic scattering on free atoms having a Maxwell-Boltzmann thermal velocity distribution. There is a good agreement in the case of the energy shifts as well as for the energy broadenings obtained using higher atomic number polycrystalline samples (Ni, Au). In the case of Si, however, the measured energy broadening is systematically larger by 15-20% than the calculated broadening for the whole primary beam energy range. Compared with the calculated values, considerably larger broadenings (by 30-60%, depending on the primary beam energy) were observed for carbonic samples. The contribution of the multiple elastic scattering to the yield of the electrons backscattered elastically, and the effect of the multiple scattering on the energy shifts and Doppler broadenings, have been determined using Monte Carlo simulations. Our results show that multiple scattering causes only small changes in energy shifts and energy broadenings of elastic peaks in the case of the samples and primary electron energy region studied.

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Section: Monte Carlo Simulationsmentioning

confidence: 99%

Energy shift and broadening of the spectra of electrons backscattered elastically from solid surfaces

Varga

Tőkési

Berényi

et al. 2001

Surface & Interface Analysis

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Experimental measurements of the surface excitation parameters of Cu, Au, Ni, Ag, Ge and Pd based on Si and other reference standard materials

Gergely

Menyhárd

Gurban

et al. 2004

Surface & Interface Analysis

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Surface excitation in electron spectroscopy is characterized by the surface excitation parameter P se . In electron spectroscopy, the total surface excitation is observed for electrons impinging and reflected elastically (elastic peak electron spectroscopy, EPES) or for backscattered (REELS) electrons. Surface excitation reduces the intensity of the elastic peak and affects the REELS spectra. Experimental determination of the total P se from EPES spectra is made by measuring the ratio of integrated elastic peak intensities for the sample I ese and reference material I ere . This paper presents further development of Tanuma's work for this ratio. P ser of the reference was calculated with the formula and material parameters of Chen. Monte Carlo simulations were based on the NIST elastic scattering and Tanuma's IMFPs database for the reference samples. This work deals with Cu, Au, Ag, Ni and Pd metals and Ge, used also as standards for electron spectroscopy. Experiments were made with a high-energy resolution spectrometer (HSA), and with a DESA 100 spectrometer (Staib Ltd) with large solid angle for E = 0.2-2 keV. Surface excitation correction factors have been developed for the above metals and Ge, used for reference samples. Their application reduced the differences in IMFPs from Tanuma's values for the uncorrected rms errors 1l u (% values) to 1l c (corrected) data for Si/Ag (from 21.2 to 6.7%), for Si/Ni (11.4 to 9.8%), and for Si/Cu (13.5 to 5%). A similar improvement was found for Si/Au, Ag/Ni, Ag/Cu and Ag/Au experimental results, using surface excitation correction.

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Quantitative analysis of the energy distributions of electrons backscattered elastically from polyethylene

Tőkési

Varga

Berényi

2015

Nuclear Instruments and Methods in Physics Research Section B:

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Determination of yield ratios of elastically backscattered electrons for deriving inelastic mean free paths in solids

Cited by 3 publications

References 13 publications

Energy shift and broadening of the spectra of electrons backscattered elastically from solid surfaces

Energy shift and broadening of the spectra of electrons backscattered elastically from solid surfaces

Experimental measurements of the surface excitation parameters of Cu, Au, Ni, Ag, Ge and Pd based on Si and other reference standard materials

Quantitative analysis of the energy distributions of electrons backscattered elastically from polyethylene

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