2024
DOI: 10.1088/1742-6596/2743/1/012011
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Determining absolute VUV fluxes for assessing the relevance of photon-surface interaction in ion sources

R Friedl,
C Frohler-Bachus,
U Fantz

Abstract: A portable device was developed to quantify VUV fluxes flexibly at ion source setups. It consists of a VUV sensitive photodiode and optical filters for wavelength selection and is calibrated against a VUV spectrometer down to 46 nm for a variety of discharge gases, including Ar, N2, O2 and H2. It was applied to the negative hydrogen ion source at BATMAN Upgrade to quantify the VUV radiation emitted by the driver as well as in front of the extraction surface (plasma grid, PG). The combined VUV fluxes impinging … Show more

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