2021
DOI: 10.1016/j.matdes.2020.109239
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Determining the constitutive behavior of nonlinear visco-elastic-plastic PMMA thin films using nanoindentation and finite element simulation

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Cited by 29 publications
(7 citation statements)
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“…Sample i (Cu/PI) serves as a reference, and its ε̅ value is 1.00. Poly­(methyl methacrylate) (PMMA) and Cr were chosen as interlayers for Sample ii (Cu/PMMA/PI) and Sample iii (Cu/Cr/PI), respectively, because they are widely used as interfacial materials in many electronic devices yet exhibit significant differences in the elasto-plastic properties. PMMA represents a soft ( E = 4.2 ± 0.8 GPa) yet elastic interlayer (ε Y = 3.4%), while Cr represents a stiff ( E = 265 ± 15 GPa) yet brittle interlayer (ε Y = 0.9%). The ε̅ values of Samples ii and iii are 0.97 and 1.01, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…Sample i (Cu/PI) serves as a reference, and its ε̅ value is 1.00. Poly­(methyl methacrylate) (PMMA) and Cr were chosen as interlayers for Sample ii (Cu/PMMA/PI) and Sample iii (Cu/Cr/PI), respectively, because they are widely used as interfacial materials in many electronic devices yet exhibit significant differences in the elasto-plastic properties. PMMA represents a soft ( E = 4.2 ± 0.8 GPa) yet elastic interlayer (ε Y = 3.4%), while Cr represents a stiff ( E = 265 ± 15 GPa) yet brittle interlayer (ε Y = 0.9%). The ε̅ values of Samples ii and iii are 0.97 and 1.01, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…Thus, one need not be surprised that even though O&P only made mention of thin-film mechanics in 1992, to identify motivations for nanoindentation research and development, the OP method of analysis emerged as a standard nanoindentation load-displacement data analysis framework that became [15], and remains [16], commonly applied to thin films. Nevertheless, as noted by Saha and Nix a decade after O&P's 1992 article, O&P formulated the OP method using monolithic materials, i.e., non-composite-like components [17].…”
Section: Needs Addressed By the Oliver-pharr Methodsmentioning
confidence: 99%
“…tensile properties [28], creep behavior [29], low-cycle fatigue [30,31], residual stress [32], and fracture toughness [33,34]) of various materials (e.g., metals [35], glasses [36], metallic glasses [37], ceramics [7,38], polymers [39][40][41], piezoelectric materials [42][43][44][45], thin films [46][47][48][49], and composites [50]). Microscratch test is also an effective technique to investigate scratch resistance of material [51], the structural integrity of multilayer coatings [52], tribological behavior [53,54], contact-induced damage/cracking [55], scratch-induced buckling failure of silicon nitride ceramic films [56], and the scratch behavior of Ce-doped YAG (Yttrium aluminum garnet, Y3Al5O12) coatings [57].…”
Section: Introductionmentioning
confidence: 99%
“…(42), and thus the relation between max h * and * f can be obtained with Eq. (38), and finally KC can be expressed as a function of * f with Eq (41)…”
mentioning
confidence: 99%