Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

Li, Han; Vlassak, Joost J.

doi:10.1557/jmr.2009.0144

Cited by 166 publications

(102 citation statements)

References 29 publications

(64 reference statements)

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“…In this function, the maximum load was varied from 80 to 1000 μN in ten steps while the application, removal and dwell times were fixed in 1s. The results, obtained using the Oliver and Pharr method 15 , correspond to the average of 15 indentations conducted for each one of the ten applied force. Figure 2 shows the deposition rate of the films as a function of the oxygen concentration in the plasma.…”

Section: Film Characterizationmentioning

confidence: 99%

Innovative low temperature plasma approach for deposition of alumina films

et al. 2014

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Alumina films were deposited from a new plasma method using aluminum acetylacetonate (AAA) powder as precursor. The AAA was sputtered in argon and oxygen plasma mixtures. It was investigated the effect of the oxygen proportion (O 2 %) on the properties of the coatings. Deposition rate was derived from the layer height measured by profilometry. The elemental composition and molecular structure of the films were determined by Rutherford backscattering and infrared spectroscopies, respectively. Grazing incidence X-ray diffraction was used to investigate the microstructure of the films while hardness was determined by nanoindentation technique. Inspections on the surface morphology and on the film composition were conducted associating scanning electron microscopy and energy dispersive spectroscopy. Incorporation of oxygen affects the plasma kinetics and consequently the properties of the coatings. As moderated concentrations of oxygen (< 25%) are added, the structure is predominantly organic containing stoichiometric amorphous alumina. On the other hand, as high O 2 % (> 25%) are incorporated, the structure become rich in metallic aluminum with carbon rising at low proportions. The deposited layer is not homogeneous in thickness once the chemical composition of the precursor is changed by the action of the reactive oxygen plasma. Oxygen ablation on the film surface also contributes to the lack of homogeneity of the structure, especially as high oxygen proportions are imposed. Hardness data (0.5-2.0 GPa) corroborated the idea of an amorphous structure. Based on the results presented here it was possible to identify the oxygen concentration in the plasma atmosphere which mostly removed organics while preserving the stoichiometric alumina precipitation, subject of great relevance as one considers the reduction in the energy necessary for the creation of fully oxide coatings.

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Section: Film Characterizationmentioning

confidence: 99%

Innovative low temperature plasma approach for deposition of alumina films

et al. 2014

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“…It is known that the presence of residual stress a ects the overall indentation response of material and, hence, the measured hardness and modulus. Tensile residual stress reduces the hardness, and di erent levels of residual stress in a lm lead to di erent values of hardness [19]. Therefore, we expected more decrease on the harness of thinner lm, but it should be considered that the hardness of thinner lms is limited to the substrate hardness.…”

Section: Resultsmentioning

confidence: 87%

“…This is because the elastic eld under the indenter is not con ned to the lm itself and extends into the substrate. At very shallow depths, the indentation moduli are equal to the true indentation moduli of the lms, but they change quickly with increasing indentation depth and approach the substrate indentation modulus [18,19].…”

Section: Resultsmentioning

confidence: 99%

The effects of thickness on magnetic properties of FeCuNbSiB sputtered thin films

et al. 2017

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Abstract. Thin lms of Fe 73:1 Cu 1 Nb 3:1 Si 14:7 B 8:2 alloy with 200, 500, and 800 nm thicknesses have been deposited by RF sputtering. Their magnetic properties have been characterized using Alternating Gradient Field Magnetometer (AGFM) and Vibrating Sample Magnetometer (VSM). The e ects of residual stresses investigated by nanoindentation experiments were conducted on the as-deposited samples. It is observed that the coercivity of as-deposited lms is inversely proportional to the thickness in relation with the residual stress induced during sputtering.

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“…The method proposed next is essentially based on similar concepts as Oliver-Pharr (9) , Doerner-Nix (7) and also with Li and Vlassak (16) . An important point is that the initial slope of the unloading curve for a plastic material should be equal to the tangent at the loaddisplacement curve of an elastic material with the same Young's modulus, if the corresponding contact area are the same (Fig.…”

Section: Methodsmentioning

confidence: 99%

“…In the first series of examples the materials are elastic and the identification is done from the loading curve. In the second series of examples the materials are elastoplastic and the identification is done on the unloading curve using a similar strategy as presented in the closed-form solution of Doerner-Nix, Oliver-Pharr or as presented in the work of Li and Vlassak (16) based on the analytical solution of the contact problem of axisymmetric indenter on a layered elastic half-space.…”

Section: Journal Of Solid Mechanics and Materials Engineeringmentioning

confidence: 99%

Identification of Young's Modulus from Indentation Testing and Inverse Analysis

Prou

Kishimoto

Constantinescu

2010

JMMP

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In this study, a numerical method for the identification of the Young's modulus of linear elastic coated materials from continuous indentation test is first presented. The identification is based on an inverse analysis where the minimization of a cost functional is performed by a gradient descent algorithm. The main result is the computation of cost function gradient by using a direct differentiation technique, resulting in a timesaving method compared to the widely used finite difference method. The validity and illustration of this approach is shown through several numerical examples. The second part of this article is dedicated to the identification of elasto-plastic thin films Young's modulus. A new method is proposed, where the inverse analysis relies only on finite element computations for elastic materials.

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Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

Cited by 166 publications

References 29 publications

Innovative low temperature plasma approach for deposition of alumina films

Innovative low temperature plasma approach for deposition of alumina films

The effects of thickness on magnetic properties of FeCuNbSiB sputtered thin films

Identification of Young's Modulus from Indentation Testing and Inverse Analysis

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