Determining the Required Pulses for Controlling the Operation of Electrostatic MEMS Converters

Salem, M.S.; Salem, M.O.S.; Zekry, Abdelhalim; Ragai, Hani

doi:10.1109/icmens.2006.348210

Cited by 4 publications

(5 citation statements)

References 4 publications

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“…Furthermore, the transitions between the system elements need to be restudied and re-simulated as they were not exactly representing the specific operation during each transition. In addition, in our previous work, the output power that was achieved from the designed converter was relatively low, 0.122 mW [38][39][40].…”

Section: Introductionmentioning

confidence: 85%

“…In this section, our proposed behavioral circuit model [38][39][40] of the electrostatic MEMS converter is reinvestigated based on its capacitance variations with respect to the input displacement, x, caused by the vibration signal. Firstly, the converter behavior based on its C-x curve is qualitatively illustrated.…”

Section: Proposed Behavioral Circuit Model Of the Electrostatic Mems ...mentioning

confidence: 99%

“…The current source, I, is used to represent the work undertaken by the converter to convert the input vibration signal into electricity. Figure 8 [38][39][40] demonstrates the block diagram of the vibration energy harvesting system which is required for reinvestigating the proposed model. This diagram will be utilized for the validation and evaluation of the converter behavioral circuit model.…”

Section: Behavioral Circuit Model Of the Enhanced Electrostatic Mems ...mentioning

confidence: 99%

“…Some switches must be added to Figure 9a to complete the interaction between the converter model and the power conditioning circuit based on the controlling pules. Figure 9b demonstrates the final circuit with all of the necessary added circuit elements used for validating and evaluating the converter model [38][39][40]. To be able to validate the converter model qualitatively, the required transitions between the model and C res , which completely represent the vibration energy harvesting system operation, must be illustrated.…”

Section: Qualitative Validation Of the Converter Modelmentioning

confidence: 99%

“…We had already developed a proposed model for the electrostatic MEMS converter, which satisfied the charge transfer between the converter model and the system storage element. However, it did not achieve a good agreement between the calculated converter output power and the simulated output power gained from the vibration energy conversion operation [38][39][40]. Furthermore, the transitions between the system elements need to be restudied and re-simulated as they were not exactly representing the specific operation during each transition.…”

Section: Introductionmentioning

confidence: 96%

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Validation and Evaluation of a Behavioral Circuit Model of an Enhanced Electrostatic MEMS Converter

et al. 2022

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In this current study, the validation and evaluation of a behavioral circuit model of electrostatic MEMS converters are presented. The main objective of such a model is to accurately find the converter behavior through the proper choice of its circuit elements. In this regard, the model enables the implementation of the electrostatic MEMS converter using commercially available off-shelf circuit elements. Thus, the overall vibration energy harvesting system can be implemented and tested without the need for fabricating the converter. As a result, the converter performance can be verified and evaluated before its fabrication which saves the expenses of fabricating trailed prototypes. To test the model, we apply it to an enhanced converter in which the conventional electrostatic MEMS converter is modified by depositing the tantalum pentoxide, Ta2O5, a high dielectric constant material, on its fingers’ sidewalls. Such a deposition technique causes an appreciable increase in the overall converter capacitance and, in turn, the output power, which is boosted from the range of µw to the range of mW. Next, the converter behavioral circuit model, which is based on representing its capacitances variations with respect to the input displacement, x caused by the vibration signal, C–x curve, is built up. The model is qualitatively validated and quantitatively evaluated. The enhanced converter performance is investigated through the interaction of its model with the power conditioning circuit. From the simulation results, it is revealed that the converter behavioral circuit model accurately accomplishes the vibration energy conversion operation. As a result, the specification of the required controlling pulses for the converter operation is accurately determined. Finally, the model accuracy is validated by calibrating its performance with a traditionally simulated and fabricated electrostatic MEMS converter.

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Section: Introductionmentioning

confidence: 85%

Section: Proposed Behavioral Circuit Model Of the Electrostatic Mems ...mentioning

confidence: 99%

Section: Behavioral Circuit Model Of the Enhanced Electrostatic Mems ...mentioning

confidence: 99%

Section: Qualitative Validation Of the Converter Modelmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 96%

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Validation and Evaluation of a Behavioral Circuit Model of an Enhanced Electrostatic MEMS Converter

et al. 2022

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Design and simulation of SOI-MEMS electrostatic vibration energy harvester for micro power generation

Sidek

Khalid

Ishak

et al. 2011

International Conference on Electrical, Control and Computer Engineering 2011 (InECCE)

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Modeling of Q – V Diagram Using SPICE for Electrostatic MEMS Converter Found in Energy Scavenging Systems

Salem

Zekry

et al. 2013

AMM

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The objective of this paper is to model the behavior of an electrostatic MEMS converter using its Q – V diagram. This model is used to sense the required instants to charge and discharge the converter. By this way the design of the converter’s controller circuit can be carried out. The converter model is implemented using SPICE circuit simulator based on discrete components. As a result, the charging and discharging instants of the converter are determined.

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Determining the Required Pulses for Controlling the Operation of Electrostatic MEMS Converters

Cited by 4 publications

References 4 publications

Validation and Evaluation of a Behavioral Circuit Model of an Enhanced Electrostatic MEMS Converter

Validation and Evaluation of a Behavioral Circuit Model of an Enhanced Electrostatic MEMS Converter

Design and simulation of SOI-MEMS electrostatic vibration energy harvester for micro power generation

Modeling of Q – V Diagram Using SPICE for Electrostatic MEMS Converter Found in Energy Scavenging Systems

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