Determining Young's modulus via the eigenmode spectrum of a nanomechanical string resonator

S., Klaß, Yannick; Doster, Juliane; Bückle, Maximilian; Braive, Rémy; Weig, Eva M.

doi:10.1063/5.0100405

Cited by 11 publications

(3 citation statements)

References 40 publications

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“…Various methods are developed to measure these parameters, including static methods, like nano-indentation [50,51] and dynamic methods like resonance response. [52][53][54][55] Many studies aiming to design highperformance nanomechanical resonators have relied on mechanical parameter values obtained from the literature without considering potential variations of thin film properties due to different deposition environments, such as commonly used materials like a-Si 3 N 4 , [10,12] c-Si, [14] and c-SiC. [15,16] While these adaptations are usually reasonable and align well with experimental results, characterizing the exact parameters of the materials used would be beneficial when exploring the optimal performance of nanomechanical resonators.…”

Section: Mechanical Property Characterization With Resonance Methodsmentioning

confidence: 99%

“…[15,16] While these adaptations are usually reasonable and align well with experimental results, characterizing the exact parameters of the materials used would be beneficial when exploring the optimal performance of nanomechanical resonators. [52,56] In this section, we present a simple and universal method to systematically characterize the important mechanical parameters of LPCVD a-SiC thin films.…”

Section: Mechanical Property Characterization With Resonance Methodsmentioning

confidence: 99%

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High‐Strength Amorphous Silicon Carbide for Nanomechanics

Xu,

Shin,

Sberna

et al. 2023

Advanced Materials

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For decades, mechanical resonators with high sensitivity have been realized using thin‐film materials under high tensile loads. Although there have been remarkable strides in achieving low‐dissipation mechanical sensors by utilizing high tensile stress, the performance of even the best strategy is limited by the tensile fracture strength of the resonator materials. In this study, a wafer‐scale amorphous thin film is uncovered, which has the highest ultimate tensile strength ever measured for a nanostructured amorphous material. This silicon carbide (SiC) material exhibits an ultimate tensile strength of over 10 GPa, reaching the regime reserved for strong crystalline materials and approaching levels experimentally shown in graphene nanoribbons. Amorphous SiC strings with high aspect ratios are fabricated, with mechanical modes exceeding quality factors 108 at room temperature, the highest value achieved among SiC resonators. These performances are demonstrated faithfully after characterizing the mechanical properties of the thin film using the resonance behaviors of free‐standing resonators. This robust thin‐film material has significant potential for applications in nanomechanical sensors, solar cells, biological applications, space exploration and other areas requiring strength and stability in dynamic environments. The findings of this study open up new possibilities for the use of amorphous thin‐film materials in high‐performance applications.This article is protected by copyright. All rights reserved

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Section: Mechanical Property Characterization With Resonance Methodsmentioning

confidence: 99%

Section: Mechanical Property Characterization With Resonance Methodsmentioning

confidence: 99%

High‐Strength Amorphous Silicon Carbide for Nanomechanics

Xu,

Shin,

Sberna

et al. 2023

Advanced Materials

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“…We attribute the remarkably small difference between our determined values for α and β and the ones from ref to the difference in growth method (MOCVD vs MBE), the gallium content (0.5658 vs 0.59), and the resonator’s support geometry. Experimental determination of Young’s modulus along the crystal directions of InGaP together with detailed material studies is required to explore the microscopic origin for this additional anisotropy.…”

mentioning

confidence: 99%

High-Q Trampoline Resonators from Strained Crystalline InGaP for Integrated Free-Space Optomechanics

et al. 2023

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Nanomechanical resonators realized from tensile-strained materials reach ultralow mechanical dissipation in the kHz to MHz frequency range. Tensile-strained crystalline materials that are compatible with epitaxial growth of heterostructures would thereby at the same time allow realizing monolithic free-space optomechanical devices, which benefit from stability, ultrasmall mode volumes, and scalability. In our work, we demonstrate nanomechanical string and trampoline resonators made from tensile-strained InGaP, which is a crystalline material that is epitaxially grown on an AlGaAs heterostructure. We characterize the mechanical properties of suspended InGaP nanostrings, such as anisotropic stress, yield strength, and intrinsic quality factor. We find that the latter degrades over time. We reach mechanical quality factors surpassing 107 at room temperature with a Q·f product as high as 7 × 1011Hz with trampoline-shaped resonators. The trampoline is patterned with a photonic crystal to engineer its out-of-plane reflectivity, desired for efficient signal transduction of mechanical motion to light.

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Integration of High‐Tc Superconductors with High‐Q‐Factor Oxide Mechanical Resonators

Manca,

Kalaboukhov,

Plaza

et al. 2024

Adv Funct Materials

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Micro‐mechanical resonators are building blocks of a variety of applications in basic science and consumer electronics. This device technology is mainly based on well‐established and reproducible silicon‐based fabrication processes with outstanding performances in term of mechanical Q‐factor and sensitivity to external perturbations. Broadening the functionalities of micro‐electro‐mechanical systems (MEMS) by the integration of functional materials is a key step for both applied and fundamental science. However, combining functional materials with silicon‐based devices is challenging. An alternative approach is directly fabricating MEMS based on compounds inherently showing non‐trivial functional properties, such as transition metal oxides. Here, a full‐oxide approach is reported, where a high‐ superconductor YBa2Cu3O7 (YBCO) is integrated with high Q‐factor micro‐bridge resonators made of single‐crystal LaAlO3 (LAO) thin films. LAO resonators are tensile strained, with a stress of about 350 MPa, show a Q‐factor above 200k, and have low roughness. YBCO overlayers are grown ex situ by pulsed laser deposition and YBCO/LAO bridges show zero resistance below 78 K and mechanical properties similar to those of bare LAO resonators. These results open new possibilities toward the development of advanced transducers, such as bolometers or magnetic field detectors, as well as experiments in solid state physics, material science, and quantum opto‐mechanics.

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Determining Young's modulus via the eigenmode spectrum of a nanomechanical string resonator

Cited by 11 publications

References 40 publications

High‐Strength Amorphous Silicon Carbide for Nanomechanics

High‐Strength Amorphous Silicon Carbide for Nanomechanics

High-Q Trampoline Resonators from Strained Crystalline InGaP for Integrated Free-Space Optomechanics

Integration of High‐Tc Superconductors with High‐Q‐Factor Oxide Mechanical Resonators

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