2010
DOI: 10.1016/j.surfcoat.2009.10.011
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Deuterated amorphous carbon films: Film growth and properties

Abstract: HardnessDeuterated amorphous carbon films (a-C:D) have been studied in the last few years in order to investigated possible isotopic effects in the film properties. When compared with films deposited in methane atmosphere, an important reduction of the deuterium content of the films was observed and the reasons for that are not well understood. In this work, we deposited amorphous carbon films by PECVD using methane and deuterated methane gas mixtures as precursor atmospheres. We also investigated the effects … Show more

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Cited by 11 publications
(9 citation statements)
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“…Consequently, one must affirm that the different isotopic systems change only the phonon distribution. Moreover, as determined in a previous work 22 , the ERDA profiles guarantee a homogenous concentration of deuterium and hydrogen as a function of depth, which rules out any possible influence of the deuterium and hydrogen distributions on the friction results.
Figure 2 Friction force of a diamond spherical dome sliding on a-C:D/H thin films (isotopic systems) with different deuterium content at an average indentation depth of ~(75 ± 10) nm.
…”
Section: Resultssupporting
confidence: 64%
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“…Consequently, one must affirm that the different isotopic systems change only the phonon distribution. Moreover, as determined in a previous work 22 , the ERDA profiles guarantee a homogenous concentration of deuterium and hydrogen as a function of depth, which rules out any possible influence of the deuterium and hydrogen distributions on the friction results.
Figure 2 Friction force of a diamond spherical dome sliding on a-C:D/H thin films (isotopic systems) with different deuterium content at an average indentation depth of ~(75 ± 10) nm.
…”
Section: Resultssupporting
confidence: 64%
“…1b) 22 . The signal width is proportional to the a-C:D/H thin film thickness and the signal shape (the slope after the maximum) is consistent with a scattering mechanism leading to conclude that both concentration profiles are constant throughout the film (see Fig.…”
Section: Resultsmentioning
confidence: 99%
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“…In our previous study and another study examining the properties of a-C:D films, the hardnesses of the a-C:D films were lower than that of the a-C:H film even if the sp 2 /sp 3 ratios of these films were the same, suggesting that the void structures of these films might be different [13][14][15]. However, the void structures of the a-C:D and a-C:H films have not been investigated.…”
Section: Introductionmentioning
confidence: 85%