The
sputtered copper nanoparticles (Cu NPs) on amorphous hydrogenated
carbon films (CuNPs@a-C:H) were deposited on a glass substrate by
the codeposition method of radio-frequency (RF)-sputtering and RF-plasma-enhanced
chemical vapor deposition methods. The thin films were synthesized
in different deposition times of 10, 15, 20, and 25 min while other
parameters were constant. Rutherford back scattering measurements
specified the atomic content of the thin films while the localized
surface plasmon resonance peak was extracted from the UV–visible
spectra. To investigate surface images, an atomic force microscope
in noncontact mode was used to give valuable information for the stereometric,
fractal, and particle analyses. The surface topography was computed
based on the ISO 25178–2:2012 standard and the Abbott-Firestone
curves; polar graphs were plotted for additional statistical information
on the surface microtexture. The autocorrelation function and three-dimensional
(3-D) surface texture interpreted surface topography, anisotropy ratio,
and functional properties which help optimize the thin film’s
functional performance. The X-ray diffraction profile which was applied
to investigate the crystalline structure confirmed copper as the major
structural component with Cu(111) and Cu(002) peaks, the intensities
of which were increased with the deposition time. Finally, particle
analyses were applied to confirm the previously obtained results.